Laser enhanced copper plating

Yuan Jiayong; Li Shijie; Wang Jinghuan; Wang Maoxin; Qin Liang; Chen Qi

Journals >Chinese Journal of Lasers >Volume 14 >Issue 10 >Page 635 > Article

Chinese Journal of Lasers
Vol. 14, Issue 10, 635 (1987)

Laser enhanced copper plating

Yuan Jiayong, Li Shijie, Wang Jinghuan, Wang Maoxin, Qin Liang, and Chen Qi

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[in Chinese]

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Yuan Jiayong, Li Shijie, Wang Jinghuan, Wang Maoxin, Qin Liang, Chen Qi. Laser enhanced copper plating[J]. Chinese Journal of Lasers, 1987, 14(10): 635 Copy Citation Text

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References

[1] E. J. Von Gutfeld et al., IBM J. Bes. Develop 1982, 26, 136.

[2] E. J. Von Gutfeld et al.; Appl. Phys. Lett., 1983 43, 876.

[3] E. J. Von Gutfeld et al., Appl. Phys. Lett., 1979, 35, 651.

Yuan Jiayong, Li Shijie, Wang Jinghuan, Wang Maoxin, Qin Liang, Chen Qi. Laser enhanced copper plating[J]. Chinese Journal of Lasers, 1987, 14(10): 635

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