• Chinese Optics Letters
  • Vol. 15, Issue 8, 081202 (2017)
Chen Li1, Yongying Yang1、*, Huiting Chai1, Yihui Zhang1, Fan Wu1, Lin Zhou1, Kai Yan1, Jian Bai1, Yibing Shen1, Qiao Xu2, Hongzhen Jiang2, and Xu Liu2
Author Affiliations
  • 1State Key Laboratory of Modern Optical Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, China
  • 2Research Center of Laser Fusion, CAEP, Mianyang 621900, China
  • show less
    DOI: 10.3788/COL201715.081202 Cite this Article Set citation alerts
    Chen Li, Yongying Yang, Huiting Chai, Yihui Zhang, Fan Wu, Lin Zhou, Kai Yan, Jian Bai, Yibing Shen, Qiao Xu, Hongzhen Jiang, Xu Liu. Dark-field detection method of shallow scratches on the super-smooth optical surface based on the technology of adaptive smoothing and morphological differencing[J]. Chinese Optics Letters, 2017, 15(8): 081202 Copy Citation Text show less
    References

    [1] Q. Xu, J. Wang, W. Li, X. Zeng, S. Jing. International Symposium on Industrial Lasers, 236(1999).

    [2] W. Liu, C. Wei, K. Yi, J. Shao. Chin. Opt. Lett., 13, 041407(2015).

    [3] J. Chen, X. Xu, C. Wei, M. Yang, J. Gu, J. Shao. Chin. Opt. Lett., 13, 032201(2015).

    [4] P. Yan. Handbook of Photomask Manufacturing Technology(2005).

    [5] M. Sugawara, I. Nishiyama, K. Motai, J. Cullins. Jpn. J. Appl. Phys., 45, 9044(2006).

    [6] R. Huan, J. Hongzhen, L. Xu. High Power Laser Part. Beams, 26, 26092011(2014).

    [7] P. Cao, Y. Yang, C. Li, H. Chai, Y. Li, S. Xie, D. Liu. Chin. Opt. Lett., 13, 041102(2015).

    [8] L. R. Baker. Metrics for High-Quality Specular Surfaces, 65(2004).

    [9] R. K. Kimmel, R. E. Parks. ISO 10110 Optics and Optical Instruments: Preparation of Drawings for Optical Elements and Systems: A User’s Guide(2002).

    [10] Y. Wang, Q. Xu, L.-Q. Chai, N. Chen, X.-Q. Zhu. High Power Laser Part. Beams, 17, 67(2005).

    [11] J. Bennett, D. Burge, J. Rahn, H. Bennett. Techincal Symposium East, 124(1979).

    [12] Y. Yang, C. Lu, J. Liang, D. Liu, L. Yang, R. Li. Acta Opt. Sin., 27, 1031(2007).

    [13] S. Wang, Y. Yang, L. Zhao, H. Chai, D. Liu, J. Bai, Y. Shen. Chin. J. Lasers, 42, 0708005(2015).

    [14] J. S. Batchelder, M. A. Taubenblatt. Dark Field Imaging Defect Inspection System for Repetitive Pattern Integrated Circuits(1993).

    [15] D. Liu, Y. Yang, L. Wang, Y. Zhuo, C. Lu, L. Yang, R. Li. Opt. Commun., 278, 240(2007).

    [16] I. T. Young, L. J. Van Vliet. Signal Process., 44, 139(1995).

    [17] A. M. Mendonca, A. Campilho. IEEE Trans. Med. Imaging, 25, 1200(2006).

    [18] H. Park, J. Yoo. IEE Proc. Vis. Image Signal Process., 148, 31(2001).

    Data from CrossRef

    [1] Pavel S. Ignatyev, Andrey A. Skrynnik, Yury A. Melnik, Sergey N. Grigoriev. Nanoscale surface characterization using laser interference microscopy. Mechanics & Industry, 18, 713(2017).

    Chen Li, Yongying Yang, Huiting Chai, Yihui Zhang, Fan Wu, Lin Zhou, Kai Yan, Jian Bai, Yibing Shen, Qiao Xu, Hongzhen Jiang, Xu Liu. Dark-field detection method of shallow scratches on the super-smooth optical surface based on the technology of adaptive smoothing and morphological differencing[J]. Chinese Optics Letters, 2017, 15(8): 081202
    Download Citation