Dark-field detection method of shallow scratches on the super-smooth optical surface based on the technology of adaptive smoothing and morphological differencing

Chen Li; Yongying Yang; Huiting Chai; Yihui Zhang; Fan Wu; Lin Zhou; Kai Yan; Jian Bai; Yibing Shen; Qiao Xu; Hongzhen Jiang; Xu Liu

doi:10.3788/COL201715.081202

Journals >Chinese Optics Letters >Volume 15 >Issue 8 >Page 081202 > Article

Chinese Optics Letters
Vol. 15, Issue 8, 081202 (2017)

Dark-field detection method of shallow scratches on the super-smooth optical surface based on the technology of adaptive smoothing and morphological differencing

Chen Li¹, Yongying Yang^1、*, Huiting Chai¹, Yihui Zhang¹, Fan Wu¹, Lin Zhou¹, Kai Yan¹, Jian Bai¹, Yibing Shen¹, Qiao Xu², Hongzhen Jiang², and Xu Liu²

Author Affiliations

¹State Key Laboratory of Modern Optical Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, China

²Research Center of Laser Fusion, CAEP, Mianyang 621900, China

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DOI: 10.3788/COL201715.081202 Cite this Article Set citation alerts

Chen Li, Yongying Yang, Huiting Chai, Yihui Zhang, Fan Wu, Lin Zhou, Kai Yan, Jian Bai, Yibing Shen, Qiao Xu, Hongzhen Jiang, Xu Liu. Dark-field detection method of shallow scratches on the super-smooth optical surface based on the technology of adaptive smoothing and morphological differencing[J]. Chinese Optics Letters, 2017, 15(8): 081202 Copy Citation Text

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