Dark-field detection method of shallow scratches on the super-smooth optical surface based on the technology of adaptive smoothing and morphological differencing

Chen Li; Yongying Yang; Huiting Chai; Yihui Zhang; Fan Wu; Lin Zhou; Kai Yan; Jian Bai; Yibing Shen; Qiao Xu; Hongzhen Jiang; Xu Liu

doi:10.3788/COL201715.081202

Journals >Chinese Optics Letters >Volume 15 >Issue 8 >Page 081202 > Article

Chinese Optics Letters
Vol. 15, Issue 8, 081202 (2017)

Dark-field detection method of shallow scratches on the super-smooth optical surface based on the technology of adaptive smoothing and morphological differencing

Chen Li¹, Yongying Yang^1、*, Huiting Chai¹, Yihui Zhang¹, Fan Wu¹, Lin Zhou¹, Kai Yan¹, Jian Bai¹, Yibing Shen¹, Qiao Xu², Hongzhen Jiang², and Xu Liu²

Author Affiliations

¹State Key Laboratory of Modern Optical Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, China

²Research Center of Laser Fusion, CAEP, Mianyang 621900, China

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DOI: 10.3788/COL201715.081202 Cite this Article Set citation alerts

Chen Li, Yongying Yang, Huiting Chai, Yihui Zhang, Fan Wu, Lin Zhou, Kai Yan, Jian Bai, Yibing Shen, Qiao Xu, Hongzhen Jiang, Xu Liu. Dark-field detection method of shallow scratches on the super-smooth optical surface based on the technology of adaptive smoothing and morphological differencing[J]. Chinese Optics Letters, 2017, 15(8): 081202 Copy Citation Text

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Abstract

There exist some shallow scratch defects on the super-smooth optical surface. Their detection has a low efficiency with the existing technologies. So a new detection method, dark-field detection of adaptive smoothing and morphological differencing (DFD-ASMD), is proposed. On one hand, the information of shallow scratches can be kept in dark-field images. On the other hand, their weak characteristics can be separated and protected from being overly reduced during the elimination of noise and background in the image. Experiments show the detection rate of shallow scratches is around 82%, and DFD-ASMD can lay a foundation for quality control of defects on the high-quality optical surface.