Qian Wang, Jiangshan Zhao, Xin Guo, Yuanyuan Fan, Yi Zhou, Rui Jiang. Analysis of Influence of Temperature Distribution in Spectral Control of Excimer Lasers for Lithography on Output Spectra[J]. Laser & Optoelectronics Progress, 2021, 58(9): 0914003
- Laser & Optoelectronics Progress
- Vol. 58, Issue 9, 0914003 (2021)
Fig. 1. Beam propagation path in LNM
Fig. 2. Temperature distribution of the prism at different moments when the laser interacts with the prism. （a） 1 min；（b） 10 min； （c） 30 min
Fig. 3. Refractive index of the prism center point changed with time when the laser interacts with the prism
Fig. 4. Distribution of refractive index of the prism when the laser interacts with the prism in the linewidth narrowing module. （a） 1 min； （b） 10 min； （c） 30 min； （d） distribution of refractive index after the laser interacts with LNM for 30 min when the display scale is refined
Fig. 5. Internal temperature distribution of linewidth narrowing module
Fig. 6. Grating surface temperature distribution
Fig. 7. Schematic of gas purging device. (a) Top view；（b） side view
Fig. 8. When using He and N2 purging, the temperature distribution in the linewidth narrowing module. （a） He； （b） N2
Fig. 9. Temperature distribution of the grating surface when using He and N2 purging. （a） He； （b） N2
Fig. 10. Spectral output results when using different inert gases for purging (30 min). （a） He； （b） N2
Fig. 11. Instantaneous spectral output results when using different inert gases for purging. （a） He； （b） N2
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Table 1. Physical properties of CaF2[10]
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Table 2. Physical properties of He and N2
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