• Laser & Optoelectronics Progress
  • Vol. 55, Issue 11, 111005 (2018)
Qiaoyue Li1、*, Gangcheng Shang2, Qiang Tian3, Xi Chen1, Xixi Han1, Yu Zhou1, and Leida Li1
Author Affiliations
  • 1 School of Information and Control Engineering, China University of Mining and Technology, Xuzhou, Jiangsu 221116, China
  • 2 Communication and Information Center, State Administration of Work Safety, Beijing 100013, China
  • 3 Automatic Mine Office, Shanxi Lu'An Environmental Energy Development Co., Ltd., Changzhi, Shanxi 0 46102, China
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    DOI: 10.3788/LOP55.111005 Cite this Article Set citation alerts
    Qiaoyue Li, Gangcheng Shang, Qiang Tian, Xi Chen, Xixi Han, Yu Zhou, Leida Li. No-Reference Quality Assessment Method of Evaluating Scanning Electron Microscopy Images Based on Multi-Scale Characteristics[J]. Laser & Optoelectronics Progress, 2018, 55(11): 111005 Copy Citation Text show less

    Abstract

    Scanning electron microscopy (SEM) imaging can visually reveal the microscopic world. In SEM imaging, the device parameters must be repeatedly adjusted to ensure the optimum image contrast. This process is often time-consuming and labor-intensive. We propose a novel no-reference quality assessment method for evaluating the SEM image contrast distortion based on multi-scale characteristics, which can be used as a guide to select imaging parameters. Firstly, a SEM image database is established, and the corresponding subjective mean opinion score (MOS) is obtained via subjective experiments. According to the multi-scale characteristics of the human visual system, 10 features are extracted, including singular value decomposition similarity with different scales, frequency domain features, and entropy. The MOS values and 10 features are then used to train a regression model via support vector regression. Finally, this model is used to predict the image quality score. The experimental results reveal that the proposed method can maintain a high level of consistency with subjective evaluation results, and its performance is superior to the mainstream full-reference and no-reference quality assessment methods.
    Qiaoyue Li, Gangcheng Shang, Qiang Tian, Xi Chen, Xixi Han, Yu Zhou, Leida Li. No-Reference Quality Assessment Method of Evaluating Scanning Electron Microscopy Images Based on Multi-Scale Characteristics[J]. Laser & Optoelectronics Progress, 2018, 55(11): 111005
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