• Acta Optica Sinica
  • Vol. 24, Issue 8, 1141 (2004)
[in Chinese]* and [in Chinese]
Author Affiliations
  • [in Chinese]
  • show less
    DOI: Cite this Article Set citation alerts
    [in Chinese], [in Chinese]. High-Accuracy Angular Displacement Measurement Using Sinusoidal Phase-Modulating Fabry-Perot Interferometer[J]. Acta Optica Sinica, 2004, 24(8): 1141 Copy Citation Text show less

    Abstract

    A sinusoidal phase-modulating Fabry-Perot interferometer is proposed. A CCD image sensor is used for measuring the distance between the transmitted beams from the two faces of the Fabry-Perot plate. From the distance, the initial angle of incidence is calculated. The sinusoidal phase-modulating interferometry is used for improving the measurement accuracy. It is insensitive to the external disturbance. Numerical calculation and experimental results make it clear that the interferometer allows high-accuracy measurements of angular displacements. The sensitivity is of the order of 10-8 rad.
    [in Chinese], [in Chinese]. High-Accuracy Angular Displacement Measurement Using Sinusoidal Phase-Modulating Fabry-Perot Interferometer[J]. Acta Optica Sinica, 2004, 24(8): 1141
    Download Citation