• Journal of Infrared and Millimeter Waves
  • Vol. 40, Issue 5, 569 (2021)
Xiao-Le MA1, Jie GUO1、*, Rui-Ting HAO1, Guo-Shuai WEI1, Guo-Wei WANG2、3, Ying-Qiang XU2、3, and Zhi-Chuan NIU2、3
Author Affiliations
  • 1Yunnan Key Laboratory of Opto-Electronic Information Technology,Yunnan Normal University,Kunming 650500,China
  • 2State Key Laboratory for Superlattices and Microstructures,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China
  • 3Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,China
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    DOI: 10.11972/j.issn.1001-9014.2021.05.001 Cite this Article
    Xiao-Le MA, Jie GUO, Rui-Ting HAO, Guo-Shuai WEI, Guo-Wei WANG, Ying-Qiang XU, Zhi-Chuan NIU. Mid-/Short-Wave dual-band infrared detector based on InAs/GaSb superlattice /GaSb bulk materials[J]. Journal of Infrared and Millimeter Waves, 2021, 40(5): 569 Copy Citation Text show less

    Abstract

    Using GaSb bulk and InAs/GaSb superlattice as short wave and medium wave infrared absorbing materials respectively, a short/mid dual-band infrared detectors with NIPPIN structure were epitaxial growth and fabricated. HRXRD and AFM tests show the FWHM of zero order peak of InAs/GaSb superlattice and GaSb peak are 17.57 arcsec and 19.15 arcsec, respectively. Surface root mean square roughness RMS is 1.82? under 10 μm×10 μm. At 77 K, the maximum product RA of resistance and area of SiO2 passivated device is 5.58×105 Ω?cm2, the dark current density is 5.27×10-7 A?cm-2, and side wall resistivity is 6.83×106 Ω?cm. After anodic sulfuration, the maximum RA of the device is 1.86×106 Ω?cm2, the dark current density is 4.12×10-7 A?cm-2, and side wall resistivity is 4.49×107 Ω?cm. Sulfurization reduces dark current of the device by more than one order of magnitude and increases side wall resistivity by one order of magnitude under the same bias. The spectral response of the sulfurization device was tested, the device has the bais polarity-dependent dual-band detection performance with low crosstalk. The 50% cutoff wavelengths of the short-wave and medium-wave channels are 1.55 μm and 4.62 μm, respectively. At 1.44 μm, 2.7 μm and 4 μm,the responsivity are 0.415 A/W, 0.435 A/W and 0.337 A/W, respectively.
    Xiao-Le MA, Jie GUO, Rui-Ting HAO, Guo-Shuai WEI, Guo-Wei WANG, Ying-Qiang XU, Zhi-Chuan NIU. Mid-/Short-Wave dual-band infrared detector based on InAs/GaSb superlattice /GaSb bulk materials[J]. Journal of Infrared and Millimeter Waves, 2021, 40(5): 569
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