Controllable Micro/Nano Structure Surface Fabricated by Femtosecond Laser and Its Applications

Yucheng Bian; Yulong Wang; Yi Xiao; Yinghui Zhang; Yunlong Jiao; Dong Wu; Chenggang Zhou; Chengli Yao

doi:10.3788/LOP57.111406

Journals >Laser & Optoelectronics Progress >Volume 57 >Issue 11 >Page 111406 > Article

Laser & Optoelectronics Progress
Vol. 57, Issue 11, 111406 (2020)

Controllable Micro/Nano Structure Surface Fabricated by Femtosecond Laser and Its Applications

Yucheng Bian^1、2、**, Yulong Wang³, Yi Xiao^4、***, Yinghui Zhang³, Yunlong Jiao^3、*, Dong Wu³, Chenggang Zhou^1、2, and Chengli Yao⁵

Author Affiliations

¹School of Microelectronics, University of Science and Technology of China, Hefei, Anhui 230026, China

²Center for Micro-and Nanoscale Research and Fabrication, University of Science and Technology of China, Hefei, Anhui 230026, China

³Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei, Anhui 230026, China

⁴School of Mechanical Engineering, Nantong Vocational University, Nantong, Jiangsu 226007, China

⁵School of Chemistry and Chemical Engineering, Hefei Normal University, Hefei, Anhui 230601, China

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DOI: 10.3788/LOP57.111406 Cite this Article Set citation alerts

Yucheng Bian, Yulong Wang, Yi Xiao, Yinghui Zhang, Yunlong Jiao, Dong Wu, Chenggang Zhou, Chengli Yao. Controllable Micro/Nano Structure Surface Fabricated by Femtosecond Laser and Its Applications[J]. Laser & Optoelectronics Progress, 2020, 57(11): 111406 Copy Citation Text

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