[1] Wang Z Q, Zhang P F, Qiao C H, et al. Simulation and analysis of general model-based wave-front sensorless adaptive optics system［J］. Chinese Journal of Lasers, 2016, 43(9): 0905002.

[2] Babcock H W. The possibility of compensating astronomical seeing［J］. Publications of the Astronomical Society of the Pacific, 1953, 65(386): 229-236.

[3] Wang J Q, Luo S, Zhang B. Influence of adhesive materials on stress characteristics of deformable mirrors under thermo-mechanical coupling［J］. Laser & Optoelectronics Progress, 2018, 55(3): 030104.

[4] Hofer H, Chen L, Yoon G Y, et al. Improvement in retinal image quality with dynamic correction of the eye′s aberrations［J］. Optics Express, 2001, 8 (11): 631-643.

[5] Feng F, Wei B B, Liu W G, et al. Experiment study of impact of high power laser irradiation on compensation of deformable mirrors［J］. Laser & Optoelectronics Progress, 2016, 53(12): 0120101.

[6] Booth M J. Adaptive optics in microscopy［J］. Philosophical Transactions of the Royal Society B, 2007, 365(1861): 2829-2843.

[7] Chen L X, Hu X C, Han K, et al. An improvement method for fitting high-frequency phase by Zernike polynomials［J］. Acta Optica Sinica, 2016, 36(3): 0314001.

[8] Wang W M, Wang Q, Qiu C K, et al. Characteristics of MEMS deformable mirror based on electrostatic parallel-plate actuate［J］. Semiconductor Optoelectronics, 2015, 36(5): 704-707, 712.

[9] Miller M H, Perrault J A, Parker G G, et al. Simple models for piston-type DM behavior［J］. Journal of Micromechanics and Microengineering, 2006, 16(2): 303-313.

[10] Perreault J A, Bifano T G, Martin L B, et al. Adaptive optic correction using microelectromechanical deformable mirrors［J］. Optical Engineering, 2002, 41(3): 561-566.

[11] Zamkotsian F, Liotard A, Lanzoni P, et al. Electrostatic micro-deformable mirror for adaptive optics［J］. Proceedings of SPIE, 2006, 6272: 627222.

[12] Wang W M, Tao F G, Wang Q, et al. A 19-element segmented MEMS deformable mirror based on electrostatic repulsive-force actuator［J］. Proceedings of SPIE, 2013, 8617: 861702.

[13] Hishinuma Y, Yang E H. Piezoelectric unimorph microactuator arrays for single-crystal silicon continuous-membrane deformable mirror［J］. Journal of Microelectromechanical Systems, 2006, 15(2): 370-379.

[14] Xiao F, Dai Y, Zhao J L. High-resolution retinal imaging system with dual deformable mirrors［J］. Acta Optica Sinica, 2015, 35(5): 0501004.

[15] Ma J Q, Hu Y L, Chen J J, et al. Displacement improvement of piezoelectric membrane microactuator by controllable in-plane stress［J］. Sensors and Actuators A: Physical, 2015, 230: 45-51.

[16] Men H Q, Zhou L P, Xiao H N. Growth mechanism and synthesizing methods of preferential orientation of AlN thin films［J］. Journal of Synthetic Crystals, 2005, 34(6): 1146-1153.

[17] Sanz H A, Clement M, Iborra E, et al. Degradation of the piezoelectric response of sputtered c-axis AlN thin films with traces of non-(0002) X-ray diffraction peaks［J］. Applied Physics Letters, 2006, 88(16): 161915.

[18] Mahamameed R, Sinha N, Pisani M B et al. Dual beam actuation of piezoelectric AlN RF MEMS switches monolithically integrated with AlN contour-mode resonators［J］. Journal of Micromechanics and Microengineering, 2008, 18: 105011.

[19] Verpoort S, Wittrock U. Actuator patterns for unimorph and bimorph deformable mirrors［J］. Applied Optics, 2010, 49(31): 37-46.

[20] Park H, Horsley D. Single-crystal PMN-PT MEMS deformable mirrors［J］. Journal of Microelectromechanical Systems, 2011, 20(6): 1473-1482.

[21] Schneider M, Bittner A, Klein A, et al. Impact of film thickness and temperature on the dielectric breakdown behavior of sputtered aluminum nitride thin films［J］. Microelectronic Engineering, 2015, 140: 47-51.

[22] Wang J Y, Silva D E. Wave-front interpretation with Zernike polynomials［J］. Applied Optics, 1980, 19(9): 1510-1518.

[23] Aleksandrov G A, Rukosuev A L, Zavalova V Y, et al. Adaptive system for high power lasers［J］. Proceedings of SPIE, 2003, 5120: 156-163.

[24] Thibos L N, Applegate R A, Schwiegerling J T, et al. Standards for reporting the optical aberrations of eyes［J］. Journal of Refractive Surgery, 2002, 18(5): 652-660.

[25] Wong L L P, Na S, Chen A I, et al. A feasibility study of piezoelectric micromachined ultrasonic transducers fabrication using a multi-user MEMS process［J］. Sensors and Actuators A: Physical, 2016, 247: 430-439.