An AlN-based piezoelectric continuous membrane deformable mirror is designed. Based on the theoretical analysis and COMSOL simulation, the structure of AlN MEMS deformable mirror is optimized and the first 14-term Zernike polynomials are fitted. Its driving performances, especially its aberration correction ability, are investigated systematically. The research results show that such a deformable mirror has the advantages of excellent linear control and large deformation. It is compatible with the COMSOL process, and its processing technique is simple and environmentally friendly, which meets the general requirements of self-adaptive optical system.