Yiteng Chen, Jifang Qiu, Zhenli Dong, Youxi Pan, Yuchen Chen, Hongxiang Guo, Jian Wu. Inverse Design and Demonstration of Vertical Couplers[J]. Acta Optica Sinica, 2021, 41(17): 1713001
- Acta Optica Sinica
- Vol. 41, Issue 17, 1713001 (2021)
Fig. 1. Schematic diagram of initialized structure of vertical coupler with metal mirror. (a) Diagram of three-dimensional rendering; (b) diagram of cross section
Fig. 2. Structural change diagrams of vertical coupler in process of optimization. (a) Global optimization; (b) local optimization; (c) binarizated optimization
Fig. 3. Effect of thickness of SiO2 on coupling efficiency of vertical coupler when central wavelength is 1550 nm
Fig. 4. Final 3D-structure diagram of vertical coupler. (a) without Al mirror; (b) with Al mirror
Fig. 5. Simulation results of vertical coupler in FDTD module. (a) Intensity distributions of optimized layer and output waveguide without Al mirror; (b) intensity distributions of optimized layer and output waveguide with Al mirror
Fig. 6. Loss diagram of vertical coupler
Fig. 7. Loss analysis results of vertical coupler. (a) Loss analysis result of vertical coupler without Al mirror; (b) loss analysis result of vertical coupler with Al mirror
Fig. 8. Simulation result of bandwidth performance of vertical coupler with Al reflected mirror
Fig. 9. Comparison of insert losses of X-polarized and Y-polarized Gaussian beams based on the same device structure
Fig. 10. Fabricated process of vertical coupler with Al mirror
Fig. 11. Tolerance analysis of process errors. (a) Coupling efficiency versus etch depth; (b) Coupling efficiency versus SOI thickness
Fig. 12. Tolerance analysis of test errors. (a) Coupling efficiency versus tilt angle; (b) coupling efficiency versus alignment error
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Table 1. Initialized parameters of vertical coupler
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