• Chinese Optics Letters
  • Vol. 19, Issue 7, 072201 (2021)
Jian Chen, Guoliang Chen, and Qiwen Zhan*
Author Affiliations
  • School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 201800, China
  • show less
    DOI: 10.3788/COL202119.072201 Cite this Article Set citation alerts
    Jian Chen, Guoliang Chen, Qiwen Zhan. Self-aligned fiber-based dual-beam source for STED nanolithography[J]. Chinese Optics Letters, 2021, 19(7): 072201 Copy Citation Text show less

    Abstract

    A fiber-based source that can be exploited in a stimulated emission depletion (STED) inspired nanolithography setup is presented. Such a source maintains the excitation beam pulse, generates a ring-shaped depletion beam, and automatically realizes dual-beam coaxial alignment that is critical for two beam nanolithography. The mode conversion of the depletion beam is realized by using a customized vortex fiber, which converts the Gaussian beam into a donut-shaped azimuthally polarized beam. The pulse width and repetition frequency of the excitation beam remain unchanged, and its polarization states can be controlled. According to the simulated point spread function of each beam in the focal region, the full width at half-maximum of the effective spot size in STED nanofabrication could decrease to less than 28.6 nm.
    E=jλ0θmax02πEo(θ,φ)×ejkrpsinθcos(φϕ)+jkzpcosθsinθdθdφ,

    View in Article

    Ifl=Iexcexp(ασIsted),

    View in Article

    Jian Chen, Guoliang Chen, Qiwen Zhan. Self-aligned fiber-based dual-beam source for STED nanolithography[J]. Chinese Optics Letters, 2021, 19(7): 072201
    Download Citation