Kuikui HE, Yutang DAI, Chaofan YAN. Ultrasonic Gas Jet Assisted Femtosecond Laser Etching of Quartz Microgrooves[J]. Acta Photonica Sinica, 2022, 51(11): 1114004
- Acta Photonica Sinica
- Vol. 51, Issue 11, 1114004 (2022)
Fig. 1. Ultrasonic jet system
Fig. 2. Simulation of single period ultrasonic coupled jetta
Fig. 3. Ultrasonic high frequency fragmentation effect
Fig. 4. Principle diagram of ultrasound-assisted femtosecond laser processing
Fig. 5. Machining drawing
Fig. 6. Effect of ultrasonic frequency on the depth and depth to width ratio of etched quartz microgroove
Fig. 7. Effect of ultrasonic power on the depth and depth to width ratio of etched quartz microgroove
Fig. 8. Effect of gas inlet pressure on the depth and depth to width ratio of etched quartz microgroove
Fig. 9. SEM image of femtosecond laser etched quartz microgroove slag attached to the wall surface
Fig. 10. Comparison of the width of femtosecond laser etching quartz microgroove with or without ultrasonic gas jet assisted
Fig. 11. Comparison of the depth of femtosecond laser etching quartz microgroove with or without ultrasonic gas jet assisted
Fig. 12. Micromorphology of quartz microgroove wall etched by femtosecond laser with or without ultrasonic assistance
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Table 1. Quartz wafer specification parameters
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Table 2. Femtosecond laser specification parameters
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