• Acta Photonica Sinica
  • Vol. 48, Issue 12, 1248004 (2019)
Xin-yu FANG and Jun CHEN*
Author Affiliations
  • School of Electronic and Information Engineering, Soochow University, Suzhou, Jiangsu 215006, China
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    DOI: 10.3788/gzxb20194812.1248004 Cite this Article
    Xin-yu FANG, Jun CHEN. I-V and C-V Characteristics of Graphene/Silicon Photodetector[J]. Acta Photonica Sinica, 2019, 48(12): 1248004 Copy Citation Text show less
    Fabrication process of Gr/n-Si Schottky photodetector
    Fig. 1. Fabrication process of Gr/n-Si Schottky photodetector
    SEM image of Gr film
    Fig. 2. SEM image of Gr film
    Gr/n-Si光电探测器的I-V曲线I-V curves of Gr/n-Si photodetector
    Fig. 3. Gr/n-Si光电探测器的I-V曲线I-V curves of Gr/n-Si photodetector
    零偏压时Gr/n-Si肖特基结能带图Energy band diagram of Gr/n-Si Schottky junction at zero bias
    Fig. 4. 零偏压时Gr/n-Si肖特基结能带图Energy band diagram of Gr/n-Si Schottky junction at zero bias
    反向偏压光照下Gr/n-Si光电探测器的结构及能带示意图Structure and energy band diagrams of Gr/n-Si photodetector at reverse bias under illumination
    Fig. 5. 反向偏压光照下Gr/n-Si光电探测器的结构及能带示意图Structure and energy band diagrams of Gr/n-Si photodetector at reverse bias under illumination
    在30~800 kHz不同频率下测量的Gr/n-Si肖特基探测器的C-V曲线C-Vcurves of Gr/n-Si photodetector measured at different frequencies from 30~800 kHz
    Fig. 6. 在30~800 kHz不同频率下测量的Gr/n-Si肖特基探测器的C-V曲线C-Vcurves of Gr/n-Si photodetector measured at different frequencies from 30~800 kHz
    光照下考虑SiNx绝缘层的Gr/n-Si肖特基结能带图Energy band diagram of Gr/n-Si Schottky junction with SiNx insulator layer under illumination
    Fig. 7. 光照下考虑SiNx绝缘层的Gr/n-Si肖特基结能带图Energy band diagram of Gr/n-Si Schottky junction with SiNx insulator layer under illumination
    f/kHzV0/VNd/(×1014 cm-3)Φn/eVWD/(×10-4 cm)ΦB0/eV
    300.4551.730.3111.850.535
    500.5501.640.3122.080.577
    1000.5991.580.3132.220.599
    2000.7761.500.3142.590.677
    4001.1121.390.3163.220.825
    6001.0921.200.3203.430.821
    8001.0911.070.3233.630.823
    Table 1. The experimental data of V0, Nd, WD, Φn, ΦB0 measured at different frequencies at room temperature
    Xin-yu FANG, Jun CHEN. I-V and C-V Characteristics of Graphene/Silicon Photodetector[J]. Acta Photonica Sinica, 2019, 48(12): 1248004
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