• Infrared and Laser Engineering
  • Vol. 51, Issue 5, 20220270 (2022)
Changzheng Sun, Yanzhen Zheng, Bing Xiong, Lai Wang, Zhibiao Hao, Jian Wang, Yanjun Han, Hongtao Li, and Yi Luo
Author Affiliations
  • Department of Electronic Engineering, Tsinghua University, Beijing 100084, China
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    DOI: 10.3788/IRLA20220270 Cite this Article
    Changzheng Sun, Yanzhen Zheng, Bing Xiong, Lai Wang, Zhibiao Hao, Jian Wang, Yanjun Han, Hongtao Li, Yi Luo. Advances in III-nitride-based microresonator optical frequency combs (Invited)[J]. Infrared and Laser Engineering, 2022, 51(5): 20220270 Copy Citation Text show less
    GaNOI nonlinear photonics platform
    Fig. 1. GaNOI nonlinear photonics platform
    (a) NIR optical frequency comb generation in sputtered AlN microring resonators[18]; (b) Near visible and green frequency comb generation via SHG, SFG and THG[19]
    Fig. 2. (a) NIR optical frequency comb generation in sputtered AlN microring resonators[18]; (b) Near visible and green frequency comb generation via SHG, SFG and THG[19]
    (a) Device schematic, (b) dispersion profile, and SEM images of (c) microring waveguide and (d) bus waveguide facet of a crystalline AlN microring resonator[14] ; (e),(f) Broadband NIR and near visible band optical frequency comb generation[21]
    Fig. 3. (a) Device schematic, (b) dispersion profile, and SEM images of (c) microring waveguide and (d) bus waveguide facet of a crystalline AlN microring resonator[14] ; (e),(f) Broadband NIR and near visible band optical frequency comb generation[21]
    (a) Schematic of Pockels soliton microcomb generation via OPO; (b)-(c) Comb initiation and expansion, and (d) the experimental setup[28]
    Fig. 4. (a) Schematic of Pockels soliton microcomb generation via OPO; (b)-(c) Comb initiation and expansion, and (d) the experimental setup[28]
    (a) FWM spectrum from a 3-mm-long GaN waveguide with 250 mW pump power; (b) FWM conversion efficiency vs. pump power[31]
    Fig. 5. (a) FWM spectrum from a 3-mm-long GaN waveguide with 250 mW pump power; (b) FWM conversion efficiency vs. pump power[31]
    (a)-(d) Fabrication procedures of GaN microring resonators; (e)-(f) SEM images of the ring waveguide and the bus waveguide in a GaN microring resonator[17]
    Fig. 6. (a)-(d) Fabrication procedures of GaN microring resonators; (e)-(f) SEM images of the ring waveguide and the bus waveguide in a GaN microring resonator[17]
    (a) Chaotic frequency comb under TM00 pump; (b) Soliton microcomb under TM00 pump; (c) Raman assisted chaotic Kerr comb with TE00 pump[17]
    Fig. 7. (a) Chaotic frequency comb under TM00 pump; (b) Soliton microcomb under TM00 pump; (c) Raman assisted chaotic Kerr comb with TE00 pump[17]
    Materialnχ(2) /pm·V−1n2/10−18m2·W−1λTPA/nm Mode area/μm2FSR/GHzQint/×106Pth/mW Remarks
    Al0.2Ga0.8As[11]3.31802614830.2810001.5~ 0.03Bonding
    Si3N4[12]20.25460~199~10< 1
    AlN[13-14]2.160.234402.34350.825MOCVD growth
    Diamond[15]2.40.824500.819250.9720
    LiNbO3[16]2.2540.186351200~44.2Bonding
    GaN[17]2.3−91.47291.63241.86.2MOCVD growth
    Table 1. Properties of microcomb material platforms at telecom wavelengths
    Changzheng Sun, Yanzhen Zheng, Bing Xiong, Lai Wang, Zhibiao Hao, Jian Wang, Yanjun Han, Hongtao Li, Yi Luo. Advances in III-nitride-based microresonator optical frequency combs (Invited)[J]. Infrared and Laser Engineering, 2022, 51(5): 20220270
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