A Micro-Silicon Multi-Slit Spectrophotometer Based on MEMS Technology

HAO Peng; WU Yi-hui; ZHANG Ping; LIU Yong-shun; ZHANG Ke; LI Hai-wen

Journals >Spectroscopy and Spectral Analysis >Volume 29 >Issue 6 >Page 1713 > Article

Spectroscopy and Spectral Analysis
Vol. 29, Issue 6, 1713 (2009)

A Micro-Silicon Multi-Slit Spectrophotometer Based on MEMS Technology

HAO Peng^1、2、*, WU Yi-hui¹, ZHANG Ping¹, LIU Yong-shun¹, ZHANG Ke^1、2, and LI Hai-wen¹

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¹[in Chinese]

²[in Chinese]

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DOI: Cite this Article

HAO Peng, WU Yi-hui, ZHANG Ping, LIU Yong-shun, ZHANG Ke, LI Hai-wen. A Micro-Silicon Multi-Slit Spectrophotometer Based on MEMS Technology[J]. Spectroscopy and Spectral Analysis, 2009, 29(6): 1713 Copy Citation Text

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References

[9] Owen A J. The Feature of Diode Array Technology in UV/Vis Spectrophotometer, Hong Kong, 1998. 15.

[12] Chrisp M P. App. Opt., 1983, 22(10): 1508.

[13] Chrisp M P. App. Opt., 1983, 22(10)： 1519.

[14] Espinosa-Mansilla A, Salinas F, del Olmo M, et al. Applied Spectroscopy, 1996, 50(4): 449.

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HAO Peng, WU Yi-hui, ZHANG Ping, LIU Yong-shun, ZHANG Ke, LI Hai-wen. A Micro-Silicon Multi-Slit Spectrophotometer Based on MEMS Technology[J]. Spectroscopy and Spectral Analysis, 2009, 29(6): 1713

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