• Spectroscopy and Spectral Analysis
  • Vol. 29, Issue 6, 1713 (2009)
HAO Peng1、2、*, WU Yi-hui1, ZHANG Ping1, LIU Yong-shun1, ZHANG Ke1、2, and LI Hai-wen1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: Cite this Article
    HAO Peng, WU Yi-hui, ZHANG Ping, LIU Yong-shun, ZHANG Ke, LI Hai-wen. A Micro-Silicon Multi-Slit Spectrophotometer Based on MEMS Technology[J]. Spectroscopy and Spectral Analysis, 2009, 29(6): 1713 Copy Citation Text show less

    Abstract

    A new mini-spectrophotometer was developed by adopting micro-silicon slit and pixel segmentation technology, and this spectrophotometer used photoelectron diode array as the detector by the back-dividing-light way. At first, the effect of the spectral bandwidth on the tested absorbance linear correlation was analyzed. A theory for the design of spectrophotometer’s slit was brought forward after discussing the relationships between spectrophotometer spectrum band width and pre-and post-slits width. Then, the integrative micro-silicon-slit, which features small volume, high precision, and thin thickness, was manufactured based on the MEMS technology. Finally, a test was carried on linear absorbance solution by this spectrophotometer. The final result showed that the correlation coefficients were larger than 0.999, which means that the new mini-spectrophotometer with micro-silicon slit pixel segmentation has an obvious linear correlation.
    HAO Peng, WU Yi-hui, ZHANG Ping, LIU Yong-shun, ZHANG Ke, LI Hai-wen. A Micro-Silicon Multi-Slit Spectrophotometer Based on MEMS Technology[J]. Spectroscopy and Spectral Analysis, 2009, 29(6): 1713
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