• Journal of Semiconductors
  • Vol. 41, Issue 10, 102301 (2020)
Feng Li1, Ruishuo Wang1, Liqiang Han2, and Jiangtao Xu1
Author Affiliations
  • 1Tianjin Key Laboratory of Imaging and Sensing Microelectronic Technology, School of Microelectronics, Tianjin University, Tianjin 300072, China
  • 2Electronic Instrumentation Laboratory, Delft University of Technology, Delft 2628CD, Netherlands
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    DOI: 10.1088/1674-4926/41/10/102301 Cite this Article
    Feng Li, Ruishuo Wang, Liqiang Han, Jiangtao Xu. Design of CMOS active pixels based on finger-shaped PPD[J]. Journal of Semiconductors, 2020, 41(10): 102301 Copy Citation Text show less

    Abstract

    To improve the full-well capacity and linear dynamic range of CMOS image sensor, a special finger-shaped pinned photodiode (PPD) is designed. In terms of process, the first N-type ion implantation of the PPD N buried layer is extended under the transfer gate, thereby increasing the PPD capacitance. Based on TCAD simulation, the width and spacing of PPD were precisely adjusted. A high full-well capacity pixel design with a pixel size of 6 × 6 μm2 is realized based on the 0.18 μm CMOS process. The simulation results indicate that the pixel with the above structure and process has a depletion depth of 2.8 μm and a charge transfer efficiency of 100%. The measurement results of the test chip show that the full-well capacity can reach 68650e. Compared with the conventional structure, the proposed PPD structure can effectively improve the full well capacity of the pixel.
    $\rm{DR} = 20\lg \frac{{{N_{{\rm{FWC}}}}}}{{{N_{{\rm{noise}}}}}},$(1)

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    ${N_{{\rm{FWC}}}} = {A_{{\rm{PPD}}}} {C_{{\rm{PPD}}}} \left( {{V_{{\rm{pin}}}} - {V_{{\rm{int}}}}} \right)/{{q}},$(2)

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    $ {V_{{\rm{pin}}}} = \frac{{q{N_{\rm{D}}}{d^2}}}{{2\varepsilon }} + \frac{{{E_{\rm{g}}}}}{{2q}} - \frac{{kT}}{q}{\rm{ln }} {\frac{{{N_{\rm{C}}}}}{{{N_{\rm{D}}}}}} , $ (3)

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    $ {W_{\rm{dep}}} = \sqrt {\frac{{2{\varepsilon _{\rm{r}}}{\varepsilon _0}\left( {{N_{\rm{A}}}{\rm{ + }}{N_{\rm{D}}}} \right)\left( {{V_{\rm{b}}} - {V_{\rm{s}}}} \right)}}{{q{N_{\rm{A}}}{N_{\rm{D}}}}}}, $ (4)

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    $\begin{array}{l} {N_{{\rm{PPD}}}} = {\rm{eDensity}}\left( {\mu {{\rm{m}}^2}/{\rm{c}}{{\rm{m}}^3}} \right) \times {{W}}\;(\mu {\rm{m}}) \times {10^{-12}} \\ \quad \quad {\rm{ = 6}}{\rm{.3857}} \times {10^{15}} \times 1 \times {10^{-12}} \approx 6385, \\ \end{array} $(5)

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    $ {\rm{FWC}}\left( {{{\rm{e}}^ - }} \right) = \frac{{{\rm{FWC}}\left( \rm{ADU} \right)}}{{K\left( {\rm{ADU}/{{\rm{e}}^ - }} \right)}}, $ (6)

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    Feng Li, Ruishuo Wang, Liqiang Han, Jiangtao Xu. Design of CMOS active pixels based on finger-shaped PPD[J]. Journal of Semiconductors, 2020, 41(10): 102301
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