Application of Three-Dimensional Phase Unwrapping Algorithm in Precision Motion Measurement

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Acta Optica Sinica >Volume 27 >Issue 1 >Page 68 > Article

Acta Optica Sinica
Vol. 27, Issue 1, 68 (2007)

Application of Three-Dimensional Phase Unwrapping Algorithm in Precision Motion Measurement

[in Chinese]^*, [in Chinese], [in Chinese], [in Chinese], and [in Chinese]

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[in Chinese]

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Application of Three-Dimensional Phase Unwrapping Algorithm in Precision Motion Measurement[J]. Acta Optica Sinica, 2007, 27(1): 68 Copy Citation Text

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References

[1] Dennis C. Ghiglia, Mark D. Pritt. Two-Dimensional Phase Unwrapping: Theory, Algorithms, and Software[M]. New York: John Wiley&Sons, Inc., 1998

[3] Matthew R. Hart, Robert A. Conant, Kam Y. Lau et al.. Stroboscopic interferometer system for dynamic MEMS characterization[J]. J. Microelectromech. System, 2000, 9(4): 409～418

[5] Christian Rembe, Richard S. Muller. Measurement system for full three-dimensional motion characterization of MEMS[J]. J. Microelectromech. System, 2002, 11(5): 479～488

[6] K. Itoh. Analysis of the phase unwrapping algorithm[J]. Appl. Opt., 1982, 21(14): 2470～2473

[7] William C. Tang, Tu-Cuong Nguyen, Michael W. Judy et al.. Eletrostatic-comb drive for lateral polysilicon resonators[J]. Sensors and Actuators A, 1990, A21～A23: 328～331