Three-dimensional phase unwrapping algorithm is an expansion of the spatial phase unwrapping algorithm in time, which contains one-dimensional temporal and two-dimensional spatial information and is very useful for motion measurement. Firstly, mathematic formula of one-dimensional temporal phase unwrapping algorithm is introduced in this paper. Then, the working principle, limitation conditions and the process of the new algorithm are discussed for precise measurement of micro-motion. In final, the micro-structure motion of micro-oscillators is measured. The results show that the new algorithm, due to time information taken into consideration, not only gets rid of the request for static reference point or reference plane for distortion measurement, but also achieves off-plane motion in the level of nanometer while surface distortion is measured at the same time.