[1] Zhou Changhe. Micro- & nano- optical structures and applications[J]. Laser & Optoelectronics Progress, 2009, 46(10): 22-27.
[2] Zhuang Jie, Zhang Dawei, Tao Chunxian, et al. A generalization of the application about optical micro-nano structure on LEDs[J]. Optical Technique, 2012, 38(1): 98-103.
[3] Wang Jinguang, Li Ming, Liu Jianfeng, et al. The applications of microfluidic in medical detection[J]. Modern Scientific Instruments, 2007, 17(6): 60-63.
[4] Jin Yonglong, Zhang Yu, Gu Ning. Fabrication of microchip with embedded optical fibers by excimer laser processing technique[J]. Chinese J Lasers, 2008, 35(11): 1821-1824.
[5] Yang Lianchen, Li Guohua, Song Lianke, et al. Design of polarizing devices based on the binary-grating diffraction[J]. Acta Photonica Sinica, 1998, 27(9): 833-837.
[6] Sun Qing. Study on high-speed fiber Bragg grating demodulation system based on diffraction grating[D]. Beijing: Beijing Institute of Technology, 2015.
[7] Xie Changqing, Zhu Xiaoli, Niu Jiebin, et al. Micro- and nano-metal structures fabrication technology and applications[J]. Acta Optica Sinica, 2011, 31(9): 0900128.
[8] Yao Hanming, Hu Song, Xing Tingwen. Optical projection exposure technology of micro and nano fabrication[M]. Bejing: Beijing University of Technology Press, 2006.
[9] Zhang Jin. Study on laser interferometric lithography[D]. Chengdu: Sichuan University, 2003.
[10] Ding Yucheng. Research progress of nanoimprint lithography and its technical challenges[J]. Journal of Qingdao Technological University, 2010, 31(1): 9-15.
[11] Lü Naiguang. Fourier optics [M]. Beijing: China Machine Press, 2006: 90-93.
[12] Zhang Wei. Talbot effect of grating and its application in wave-front sensing[D]. Jinan: Shandong Normal University, 2015.
[13] Teng Shuyun, Liu Liren, Zu Jifeng, et al. Equivalence of Talbot effect of the grating illuminated by the pulsed laser and continuous polychromatic light[J]. Chinese J Lasers, 2004, 31(10): 1177-1182.
[14] Wang Junhong. Study about fractal grating and its self-image effect[D]. Jinan: Shandong Normal University, 2015.
[15] Zhang Baohao, Zhou Sumei, Yang Xiaoming, et al. Talbot effect of square-aperture microlens array[J]. Acta Optica Sinica, 2016, 36(5): 0523001.
[16] Qu Weijuan, Yan Aimin, Liu Liren, et al. Fractional Talbot effect of 2D skewed periodic array[J]. Chinese J Lasers, 2006, 33(3): 356-360.
[17] Tan Qiaofeng, Zhang Yan, Jin Guofan. High-efficiency spatial color separation method based on fractional Talbot effect[J]. Chinese Optics Letters, 2009, 7(11): 975-977.
[18] Isoyan A, Jiang F, Cheng Y C, et al. Talbot lithography: self-imaging of complex structures[J]. J Vac Sci Technol B, 2009, 27(6): 2931-2937.
[19] Dunbar L A, Nguyen D, Timotijevic B, et al. Talbot lithography as an alternative for contact lithography for submicron features[C]. SPIE, 2014, 8974: 89740F.
[20] Dammann H, Groh G, Kock M. Restoration of faulty images of periodic objects by means of self-imaging[J]. Applied Optics, 1971, 10(6): 1454-1455.
[21] Stuerzebecher L, Fuchs F, Zeitner U D, et al. High-resolution proximity lithography for nano-optical components[J]. Microelectronic Engineering, 2014, 132: 120-134.
[22] Sato T, Yamada A, Suto T, et al. Printability of defectsin Talbot lithography[J]. Microelectronic Engineering, 2015, 143: 21-24.
[23] Zanke C, Qi M H, Smith H I. Large-area patterning for photonic crystals via coherent diffraction lithography[J]. J Vac Sci Technol B, 2004, 22(6): 3352-3355.
[24] Solak H H, Ekinci Y. Achromatic spatial frequency multiplication: a method for production of nanometer-scale periodic structures[J]. J Vac Sci Technol B, 2005, 23(6): 2705-2710.
[25] Solak H H, Dais C, Clube F. Displacement TalbotLithography: a new method for high-resolution patterning of large areas[J]. Optics Express, 2011, 19(19): 10686-10691.
[26] Solak H H, Dais C, Clube F, et al. Phase shifting masks in Displacement Talbot Lithography for printing nano-grids and periodic motifs[J]. Microelectronic Engineering, 2015, 143: 74-80.
[27] Wang L, Clube F, Dais C, et al. Sub-wavelength printing in the deep ultra-violet region using Displacement Talbot Lithography[J]. Microelectronic Engineering, 2016, 161: 104-108.
