• Chinese Optics Letters
  • Vol. 15, Issue 7, 071402 (2017)
Zhijun Yuan1、2, Haibo Zhang1、2, Ren Ye1、2, Jun Zhou1、2、*, Yunrong Wei1、2, and Qihong Lou1、2
Author Affiliations
  • 1Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
  • 2Shanghai Key Laboratory of All Solid-state Laser and Applied Techniques, Shanghai 201800, China
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    DOI: 10.3788/COL201715.071402 Cite this Article Set citation alerts
    Zhijun Yuan, Haibo Zhang, Ren Ye, Jun Zhou, Yunrong Wei, Qihong Lou. Wavelength calibration of narrowband ArF laser with iron hollow cathode lamp[J]. Chinese Optics Letters, 2017, 15(7): 071402 Copy Citation Text show less
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    Data from CrossRef

    [1] Dongliang Lin, Fang Zhang, Weilin Cheng, Huijie Huang. Arbitrary trapezoidal illumination generation method based on variable slits for optical lithography. Applied Optics, 57, 2827(2018).

    [2] V. K. Saini, P. Kumar, K. K. Sarangpani, S. K. Dixit, S. V. Nakhe. Development of a see-through hollow cathode discharge lamp for (Li/Ne) optogalvanic studies. Review of Scientific Instruments, 88, 093101(2017).

    Zhijun Yuan, Haibo Zhang, Ren Ye, Jun Zhou, Yunrong Wei, Qihong Lou. Wavelength calibration of narrowband ArF laser with iron hollow cathode lamp[J]. Chinese Optics Letters, 2017, 15(7): 071402
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