Zhijun Yuan, Haibo Zhang, Ren Ye, Jun Zhou, Yunrong Wei, Qihong Lou. Wavelength calibration of narrowband ArF laser with iron hollow cathode lamp[J]. Chinese Optics Letters, 2017, 15(7): 071402
- Chinese Optics Letters
- Vol. 15, Issue 7, 071402 (2017)
Fig. 1. Spectrum of the line-narrowed ArF laser (FWHM 0.376 pm).
Fig. 2. Experimental setup for wavelength calibration of the ArF laser. HCL, hollow cathode lamp; HV, high voltage; PC personal computer; HR, high-reflection mirror.
Fig. 3. Wavelength with the position of the laser spot on the LDA.
Fig. 4. Waveform of iron OG signal recorded by an oscilloscope.
Fig. 5. OG signal amplitude with discharge current.
Fig. 6. OG signal amplitude at a different laser power and discharge current.
Fig. 7. OG signal amplitude recorded in the wavelength range of 193.38500–193.39500 nm.
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Table 1. Key Parameters of the Wavelength Measurement
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