Wavelength calibration of narrowband ArF laser with iron hollow cathode lamp

Zhijun Yuan; Haibo Zhang; Ren Ye; Jun Zhou; Yunrong Wei; Qihong Lou

doi:10.3788/COL201715.071402

Journals >Chinese Optics Letters >Volume 15 >Issue 7 >Page 071402 > Article

Chinese Optics Letters
Vol. 15, Issue 7, 071402 (2017)

Wavelength calibration of narrowband ArF laser with iron hollow cathode lamp

Zhijun Yuan^1,2, Haibo Zhang^1,2, Ren Ye^1,2, Jun Zhou^1,2,*..., Yunrong Wei^1,2 and Qihong Lou^1,2|Show fewer author(s)

Author Affiliations

¹Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

²Shanghai Key Laboratory of All Solid-state Laser and Applied Techniques, Shanghai 201800, China

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DOI: 10.3788/COL201715.071402 Cite this Article Set citation alerts

Zhijun Yuan, Haibo Zhang, Ren Ye, Jun Zhou, Yunrong Wei, Qihong Lou, "Wavelength calibration of narrowband ArF laser with iron hollow cathode lamp," Chin. Opt. Lett. 15, 071402 (2017) Copy Citation Text

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The article is cited by 5 article(s) from Web of Science.

Zhijun Yuan, Haibo Zhang, Ren Ye, Jun Zhou, Yunrong Wei, Qihong Lou, "Wavelength calibration of narrowband ArF laser with iron hollow cathode lamp," Chin. Opt. Lett. 15, 071402 (2017)

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