Wavelength calibration of narrowband ArF laser with iron hollow cathode lamp

Zhijun Yuan; Haibo Zhang; Ren Ye; Jun Zhou; Yunrong Wei; Qihong Lou

doi:10.3788/COL201715.071402

Journals >Chinese Optics Letters >Volume 15 >Issue 7 >Page 071402 > Article

Chinese Optics Letters
Vol. 15, Issue 7, 071402 (2017)

Wavelength calibration of narrowband ArF laser with iron hollow cathode lamp

Zhijun Yuan^1、2, Haibo Zhang^1、2, Ren Ye^1、2, Jun Zhou^1、2、*, Yunrong Wei^1、2, and Qihong Lou^1、2

Author Affiliations

¹Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

²Shanghai Key Laboratory of All Solid-state Laser and Applied Techniques, Shanghai 201800, China

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DOI: 10.3788/COL201715.071402 Cite this Article Set citation alerts

Zhijun Yuan, Haibo Zhang, Ren Ye, Jun Zhou, Yunrong Wei, Qihong Lou. Wavelength calibration of narrowband ArF laser with iron hollow cathode lamp[J]. Chinese Optics Letters, 2017, 15(7): 071402 Copy Citation Text

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Zhijun Yuan, Haibo Zhang, Ren Ye, Jun Zhou, Yunrong Wei, Qihong Lou. Wavelength calibration of narrowband ArF laser with iron hollow cathode lamp[J]. Chinese Optics Letters, 2017, 15(7): 071402

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