[1] Li Y L, Liu X H, Wu Q. Evolution and updates of advanced photolithography technology[J]. Laser&Optoelectronics Progress, 59, 0922006(2022).
[2] Tian M Y, Zuo P, Liang M S et al. Femtosecond laser processing of low-dimensional nanomaterials and its application[J]. Chinese Journal of Lasers, 48, 0202004(2021).
[3] Cui Y, Zhang H Y, Zhao Y A et al. Microscopic properties changes of Au film under action of femtosecond laser[J]. Chinese Journal of Lasers, 46, 0203001(2019).
[4] Khan A, Wang Z B, Sheikh M A et al. Parallel near-field optical micro/nanopatterning on curved surfaces by transported micro-particle lens arrays[J]. Journal of Physics D: Applied Physics, 43, 305302(2010).
[5] Gao W, Zheng M L, Jin F et al. Fast fabrication of large-area two-dimensional micro/nanostructure by femtosecond laser[J]. Laser&Optoelectronics Progress, 57, 111421(2020).
[6] Lin Z Y, Ji L F, Wu Y et al. Sub-micron-structure array on silicon surface fabricated by dielectric microsphere assisted laser irradiation followed by chemical etching[J]. Chinese Journal of Lasers, 43, 0602008(2016).
[7] Kohsaka Y. Removing background and estimating a unit height of atomic steps from a scanning probe microscopy image using a statistical model[J]. The Review of Scientific Instruments, 92, 033702(2021).
[8] Kuang J J, Luo N N, Zhang J Y et al. Review on the progress of parallel micro/nano lithography based on spatial light modulator[J]. Laser & Optoelectronics Progress, 59, 1100009(2022).
[9] Choi W K, Liew T H, Dawood M K et al. Synthesis of silicon nanowires and nanofin arrays using interference lithography and catalytic etching[J]. Nano Letters, 8, 3799-3802(2008).
[10] Lin Y, Hong M H, Chong T C et al. Ultrafast-laser-induced parallel phase-change nanolithography[J]. Applied Physics Letters, 89, 041108(2006).
[11] Kuo C W, Shiu J Y, Chen P L et al. Fabrication of size-tunable large-area periodic silicon nanopillar arrays with sub-10-nm resolution[J]. The Journal of Physical Chemistry B, 107, 9950-9953(2003).
[12] Wang Z B, Luk’yanchuk B, Hong M et al. Energy flow around a small particle investigated by classical Mie theory[J]. Physical Review B, 70, 035418(2004).
[13] Luk’yanchuk B S, Arnold N, Huang S M et al. Three-dimensional effects in dry laser cleaning[J]. Applied Physics A, 77, 209-215(2003).
[14] Chen Z G, Taflove A, Backman V. Photonic nanojet enhancement of backscattering of light by nanoparticles: a potential novel visible-light ultramicroscopy technique[J]. Optics Express, 12, 1214-1220(2004).
[15] Chen L W, Zhou Y, Li Y et al. Microsphere enhanced optical imaging and patterning: from physics to applications[J]. Applied Physics Reviews, 6, 021304(2019).
[16] Fardel R, McLeod E, Tsai Y C et al. Nanoscale ablation through optically trapped microspheres[J]. Applied Physics A, 101, 41-46(2010).
[17] Chen C F, Zheng Y, Fang C L. Improvement of luminescence efficiency and stability of CsPbBr2 quantum dot films with microlens array structure[J]. Chinese Journal of Lasers, 48, 1313001(2021).
[18] Li J J, Chu C Y, Lu W T et al. Development of microlens arrays: from fabrication to photonic applications[J]. Acta Optica Sinica, 41, 2100001(2021).
[19] Li L, Guo W, Wang Z B et al. Large-area laser nano-texturing with user-defined patterns[J]. Journal of Micromechanics and Microengineering, 19, 054002(2009).
[20] Hong M H, Wang Z B, Luk’yanchuk B S et al. From transparent particle light enhancement to laser nanoimprinting[J]. Journal of Laser Micro/Nanoengineering, 1, 61-66(2006).
[21] Khan A, Wang Z B, Sheikh M A et al. Laser micro/nano patterning of hydrophobic surface by contact particle lens array[J]. Applied Surface Science, 258, 774-779(2011).
[22] Pena A N, Wang Z B, Whitehead D et al. Direct writing of micro/nano-scale patterns by means of particle lens arrays scanned by a focused diode pumped Nd∶YVO4 laser[J]. Applied Physics A, 101, 287-295(2010).
[23] Mie G. Beiträge zur optik trüber medien, speziell kolloidaler metallösungen[J]. Annalen Der Physik, 25, 377-445(1908).
[24] Chang P A, Chen R, Wu Y J. Reduction of neuropathy target esterase does not affect neuronal differentiation, but moderate expression induces neuronal differentiation in human neuroblastoma (SK-N-SH) cell line[J]. Molecular Brain Research, 141, 30-38(2005).
[25] Ba P F, Li Q Z, Wu J J et al. Automatic design technology and software of dielectric metalens[J]. Acta Optica Sinica, 42, 0722001(2022).