[2] Chen J, Sun Y H, Lü X, et al. Preparation and characterization of high-transmittance AZO films using RF magnetron sputtering at room temperature[J]. Applied Surface Science, 2014, 317: 1000-1003.
[4] Chen Xinliang, Wang Fei, Yan Congbo, et al. Research on the fabrication technology and charactersictics for TCO thin films applied in thin film solar cells[J]. Materials Review, 2011, 25(9): 73-77.
[5] Sahu D R, Huang J L. High quality transparent conductive ZnO/Ag/ZnO multilayer films deposited at room temperature[J]. Thin Sold Films, 2006, 515(3): 876-879.
[6] Wang Xiaojin, Zeng Xiaobin, Huang Diqiu, et al. Structural, electrical and optical properties of aluminum-doped zinc oxide deposited on glass and polymide by RF magnetron sputtering method[J]. Laser & Optoelectronics Progress, 2012, 49(4): 043102.
[8] Fahland M, Karlsson P, Charton C. Low resistivity transparent electrodes for displays on polymer substrates[J]. Thin Solid Films, 2001, 392(2): 334-337.
[9] Yang T L, Zhang Z S, Song S M, et al. Structural, optical and electrical properties of AZO/Cu/AZO tri-layer films prepared by radio frequency magnetron sputtering and ion-beam sputtering[J]. Vacuum, 2008, 83(2): 257-260.
[10] Li F S, Zhang Y Z, Wu C X, et al. Improving efficiency of organic light-emitting diodes fabricated utilizing AZO/Ag/AZO multilayer electrode[J]. Vacuum, 2012, 86(12): 1895-1897.
[11] Wu H W, Chu C H. Structural and optoelectronic properties of AZO/Mo/AZO thin films prepared by RF magnetron sputtering[J]. Materials Letters, 2013, 105: 65-67.
[12] Tak Y H, Kim K B, Park H G, et al. Criteria for ITO (indium-tin-oxide) thin film as the bottom electrode of an organic light emitting diode[J]. Thin Solid Films, 2002, 411(1): 12-16.
[13] Sivaramakrishnan K, Theodore N D, Moulder J F, et al. The role of copper in ZnO/Cu/ZnO thin films for flexible electronics[J]. Journal of Applied Physics, 2009, 106(6): 063510.
[14] Theuring M, Vehse M, von Maydell K, et al. AZO-Ag-AZO transparent electrode for amorphous silicon solar cells[J]. Thin Solid Films, 2014, 558: 294-297.
[15] Jung Y S, Park Y S, Kim K H, et al. Properties of AZO/Ag/AZO multilayer thin film deposited on polyethersulfone substrate[J]. Transactions on Electrical and Electronic Materials, 2013, 14(1): 9-11.
[16] Haacke G. New figure of merit for transparent conductors[J]. Journal of Applied Physics, 1976, 47(9): 4086-4089.