Jiao Bai, Jingwen Li, Xiaohao Wang, Xinghui Li. Research Progress of High Precision Chromatic Confocal Displacement Measurement Technology[J]. Laser & Optoelectronics Progress, 2023, 60(3): 0312014
- Laser & Optoelectronics Progress
- Vol. 60, Issue 3, 0312014 (2023)
Fig. 1. Diagram of chromatic confocal technology. (a) Basic principle; (b) response curve
![Turned and milled surface measurement by chromatic confocal sensor[21]](/richHtml/lop/2023/60/3/0312014/img_02.jpg)
Fig. 2. Turned and milled surface measurement by chromatic confocal sensor[21]
![On-machine furface profile measurement by chromatic confocal technology. (a), (b), (c) Turned sphere surface[26]; (d), (e), (f) grinded free-form surface[27]](/Images/icon/loading.gif){kind=icon}
Fig. 3. On-machine furface profile measurement by chromatic confocal technology. (a), (b), (c) Turned sphere surface[26]; (d), (e), (f) grinded free-form surface[27]
Fig. 4. Micro structure measurement using chromatic confocal technology. (a) Microcolumn array[38]; (b) microgroove[40]; (c) MEMS structure[41]; (d) micro letter structure[44]
Fig. 5. Biological tissues measurement using chromatic confocal sensors. (a) Onion slices[45]; (b) human cornea[46]; (c), (d) porcine oral mucosa[48]; (e) teeth profile[49]
Fig. 6. Workpiece thickness measurement using chromatic confocal sensor. (a) Step height measurement[50]; (b) symmetrical measurement[51]; (c) auxiliary membrane symmetry measurement[54]
Fig. 7. Film thickness measurement by chromatic confocal technology. (a), (b) Double-layer reflective method[58]; (c) constant incident-angle method[60]
Fig. 8. Light source of chromatic confocal system. (a) PCF device and its spectrum[63]; (b) MOF supercontinum light source and its spectrum[64]
Fig. 9. Dispersion objective of chromatic confocal system. (a), (b), (c) Lens group[72-73, 75]; (d) series lens[77]
Fig. 10. Dispersion objective based on DOE. (a) Dispersion characteristics of DOE[79]; (b) DOE physical object[87]; (c) chromatic confocal system with DOE[79]; (d), (e) DOE mixed with lens[85]; (f) DOE multipoint chromatic confocal system[84]
Fig. 11. Chromatic confocal system with different confocal types. (a) Pinhole array[94]; (b) LCD pixel array[45]
Fig. 13. Detection methods of chromatic confocal system. (a) Transmissivity difference[103]; (b) CCD difference[104]
Fig. 14. Normalization strategies of chromatic confocal system. Normalization strategies of (a), (b) light source spectrum[97]; (c), (d) reflected spectrum after removing dispersion objective[64]; (e), (f) pre-scaned self-reference spectrum[108]
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Table 1. Performance parameters of several chromatic confocal sensor products
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