Xin Li, Tong Zhang, Lingfei Ji, Litian Zhang. Study on Self-Forming Behavior and Mechanism of Silicon Microholes by Picosecond Laser Scanning[J]. Laser & Optoelectronics Progress, 2022, 59(1): 0114005
- Laser & Optoelectronics Progress
- Vol. 59, Issue 1, 0114005 (2022)
Fig. 1. Laser scanning path diagram
Fig. 2. Microhole images of different pulse energy densities, ×50. (a) 0.28 J/cm2; (b) 0.52 J/cm2; (c) 0.68 J/cm2; (d) 0.79 J/cm2; (e) 1.59 J/cm2; (f) 2.39 J/cm2; (g) 3.18 J/cm2; (h) 4.77 J/cm2; (i) 6.37 J/cm2
Fig. 3. Experimental results. (a) SEM of grooves; (b) a partial enlargement of Fig. (a); (c) SEM of microholes; (d) a partial enlargement of Fig. (c)
Fig. 4. Microhole images of different repeat scan times, ×50. (a) 1 time; (b) 5 times; (c) 10 times; (d) 15 times; (e) 20 times;
Fig. 5. Unilateral microhole images at different scanning speeds, ×100. (a) 1400 mm/s; (b) 1200 mm/s; (c) 1000 mm/s; (d) 800 mm/s
Fig. 6. Surface maximum temperature curves of different pulse energy densities
Fig. 7. Simulation of temperature field in a pulse cycle. (a) 80 μs; (b) 81 μs; (c) 83 μs; (d) 84 μs
Fig. 8. Schematic of microhole evolution process
Fig. 9. Relationship between maximum temperature at edge of groove and number of effective pulses per unit area
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Table 1. Comparison table of laser power and energy density
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