Study on Self-Forming Behavior and Mechanism of Silicon Microholes by Picosecond Laser Scanning

Xin Li; Tong Zhang; Lingfei Ji; Litian Zhang

doi:10.3788/LOP202259.0114005

Journals >Laser & Optoelectronics Progress >Volume 59 >Issue 1 >Page 0114005 > Article

Laser & Optoelectronics Progress
Vol. 59, Issue 1, 0114005 (2022)

Study on Self-Forming Behavior and Mechanism of Silicon Microholes by Picosecond Laser Scanning

Xin Li^1、2, Tong Zhang^1、2, Lingfei Ji^1、2、*, and Litian Zhang^1、2

Author Affiliations

¹Institute of Laser Engineering, Beijing University of Technology, Beijing 100124, China

²Key Laboratory of Trans-Scale laser Manufacturing Technology, Ministry of Education, Beijing University of Technology, Beijing 100124, China

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DOI: 10.3788/LOP202259.0114005 Cite this Article Set citation alerts

Xin Li, Tong Zhang, Lingfei Ji, Litian Zhang. Study on Self-Forming Behavior and Mechanism of Silicon Microholes by Picosecond Laser Scanning[J]. Laser & Optoelectronics Progress, 2022, 59(1): 0114005 Copy Citation Text

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