An analytical analysis method for the impact of polarization aberration of projection lens on aerial image of alternating phase-shift mask (Alt-PSM) is proposed. Analytical expressions of image placement error (IPE) and best focus shift (BFS) caused by polarization aberration are derived. Analytical analysis for effect of every Pauli- Zernike polarization aberration to aerial image is realized. The linear relationships between IPE and odd items of Pauli-Zernike polarization aberrations, as well as that between BFS and even items of Pauli- Zernike polarization aberrations are established. The validity of analytical results is verified by numerical simulations, and the accuracy of linear relationships is assessed by the least square method.