Fig. 1. (a) Schematic of envisioned DWDM architecture with integrated OFC, MOSCAP (de-)interleaver, MRRs, and photodetectors; (b) (de-)interleaver after comb-source [
6].
Fig. 2. Finite difference eigen-mode (FDE) calculations for (a) effective index (neff), (b) group index (ng), (c) effective index change versus width (dneff/dw), (d) effective index change versus thickness (dneff/dt), (e) wavelength shift versus width (Δλ0/dw), (f) wavelength shift versus thickness (Δλ0/dt).
Fig. 3. (a) 3D schematic of the heterogeneous III–V/Si MOSCAP tuner, (b) simulated TE optical mode for a HfO2 dielectric interface, and (c) TEM image of a GaAs/dielectric/Si interface as an example.
Fig. 4. Simulated refractive index change and FCA losses for (a) n−GaAs/Al2O3/p−Si, and (b) n−GaAs/HfO2/p−Si for gap thicknesses of 5, 10, 15, 20, and 25 nm. Layer doping: n-GaAs (3×1018 cm−2), n−Al0.20Ga0.80As (3×1018 cm−2), Si (5×1016 cm−2).
Fig. 5. 65 GHz (de-)interleaver transmission response with and without MOSCAP phase tuning for (a) second-order AMZI and (b) third-order AMZI.
Fig. 6. 65 GHz (de-)interleaver transmission response with and without MOSCAP phase tuning for (a) one-ring RAMZI, (b) two-ring RAMZI, (c) three-ring RAMZI, and (d) two-channel coupled two-ring resonator.
Fig. 7. Microscope images of various (de-)interleavers: (a) second-order AMZI; (b) third-order AMZI; (c)–(e) one-, two-, three-ring-assisted AMZIs; and (f) second-order cascaded rings.
Fig. 8. (a) Microscope image of angled III–V/Si test structures and cutback loss measurements for evaluating III–V/Si transition losses, (b) image of MOSCAP MZI structure for evaluating phase tuning efficiency and optical response as a function of bias voltage.
Fig. 9. Measured response of second-order MOSCAP AMZI (de-)interleaver with (a) un-corrected phase and (b) corrected phase with Vdelay1=−1 V.
Fig. 10. Measured response of third-order MOSCAP AMZI (de-)interleaver with (a) un-corrected phase and (b) corrected phase with Vdelay1=0.3 V, Vdelay2=1 V, Vdelay3=0.1 V.
Fig. 11. Measured response of one-ring-assisted MOSCAP AMZI (de-)interleaver with (a) un-corrected phase and (b) corrected phase at Vring1=0 V, Vdelay=−2 V. Measured response of two-ring-assisted MOSCAP AMZI (de-)interleaver with (c) un-corrected phase and (d) corrected phase at Vring1=0 V, Vring2=0 V, Vdelay=−2 V. Measured response of three-ring-assisted MOSCAP AMZI (de-)interleaver with (e) un-corrected phase and (f) corrected phase at Vring1=0 V, Vring2=0 V, Vring2=0 V, Vdelay=−3 V.
Authors | Device Type | Material | Wave. (μm) | Sep. (GHz) | XT (dB) | IL (dB) | Tuning Pow. (mW) |
---|
Q. Deng | 2nd-order AMZI | Si | 1.55 | 1838 | −15 | 0.4 | 0 | A. Rizzo [16] | 1-ring RAMZI | Si | 1.55 | 400 | −15 | | N/A | S. Lai [41] | SCOW | Si | 1.55 | 100 | −20 | 8 | 0 | J. F. Song [19] | 1-ring RAMZI | Si | 1.55 | 178 | −22 | 8 | 25.5 | N. Zhou [18] | MZI-SLM | Si | 1.55 | 56 | N/A | | 23 | J. F. Song [42] | 1-ring RAMZI | Si | 1.55 | 1250 | −7 to −10 | 10 | 0 | J. F. Song [43] | 1-ring RAMZI | Si | 1.55 | 250 | | 8 | 0 | L. W. Luo [14] | 3-ring RAMZI | Si | 1.55 | 120 | −20 | 8 | 5 | M. Cherchi [44] | 2nd-order AMZI | Si | 1.55 | 1875 | −22 | 3 | 0 | M. Cherchi [45] | 1-ring RAMZI | Si | 1.55 | 125 | −9 to −18 | 3 | 0 | X. Jiang [46] | MZI-SLM | Si | 1.55 | 123 | −20 | | N/A | This work | 2nd-order AMZI | | 1.31 | 65 | −22 to −15 | 2 | 0.000083 | This work | 3rd-order AMZI | | 1.31 | 65 | −32 to −22 | 1.4 | 0.000053 | This work | 1-ring RAMZI | | 1.31 | 65 | −27 to −16 | 1.8 | 0.000010 | This work | 2-ring RAMZI | | 1.31 | 65 | −22 to −21 | 2.0 | 0.00722 | This work | 3-ring RAMZI | | 1.31 | 65 | −20 to −18 | 4.4 | 0.000034 |
|
Table 1. Complete Survey of State-of-the-Art DWDM Si (De-)interleavers
Design | (μm) | | | | |
---|
2nd-order AMZI | 610.5 | 0.50 | 0.29 | 0.08 | – | 3rd-order AMZI | 610.5 | 0.50 | 0.19 | 0.19 | 0.025 |
|
Table 2. Design Summary of III–V/Si MOSCAP Nth-Order AMZI (De-)interleavers
Design | (μm) | | | | | |
---|
1-ring RAMZI | 1200 | 0.89 | – | – | 0.50 | 0.50 | 2-ring RAMZI | 1200 | 0.97 | 0.62 | – | 0.50 | 0.50 | 3-ring RAMZI | 1200 | 0.96 | 0.68 | 0.25 | 0.50 | 0.50 |
|
Table 3. Design Summary of III–V/Si MOSCAP One-, Two-, Three-ring RAMZI (De-)interleavers
Design Name | Si Doping () | Gate Type |
---|
Design 1 | 4 × 1016 | (6 nm) | Design 2 | 5 × 1017 | (10/3 nm) | Design 3 | u.i.d. | (5.4/3 nm) |
|
Table 4. Fabricated Platform Variations