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Chinese Optics Letters
Vol. 14, Issue 8, 083401 (2016)

Interface characterization of Mo/Si multilayers

Jiaoling Zhao^1、2, Hongbo He^1、*, Hu Wang^1、2, Kui Yi¹, Bin Wang^1、2, and Yun Cui¹

Author Affiliations

¹Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

²University of Chinese Academy of Sciences, Beijing 100049, China

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DOI: 10.3788/COL201614.083401 Cite this Article Set citation alerts

Jiaoling Zhao, Hongbo He, Hu Wang, Kui Yi, Bin Wang, Yun Cui. Interface characterization of Mo/Si multilayers[J]. Chinese Optics Letters, 2016, 14(8): 083401 Copy Citation Text

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References

[1] B. Wu, A. Kumar. Appl. Phys. Rev., 1, 011104(2014).

[2] S. Yi, B. Mu, X. Wang, J. Zhu, L. Jiang, Z. Wang, P. He. Chin. Opt. Lett., 12, 013401(2014).

[3] Y. Li, H. Zhang, H. Wang, F. He, X. Wang, Y. Liu, J. Cao. Appl. Surf. Sci., 317, 902(2014).

[4] S. Yulin, N. Benoit, T. Feigl, N. Kaiser. Microelectron. Eng., 83, 692(2006).

[5] T. Feigl, S. A. Yulin, N. Kaiser, R. Thielsch. Proc. SPIE, 3997, 420(2000).

[6] J. L. Zhao, K. Yi, H. Wang, M. Fang, B. Wang, G. Hu, H. B. He. Thin Solid Films, 592, 256(2015).

[7] J. G. Hu, Q. W. Li, X. D. Lin, Y. Liu, J. H. Long, L. Y. Wang, H. B. Tang. Chin. Opt. Lett., 12, 072201(2014).

[8] S. L. Nyabero, R. W. E. van de Kruijs, A. E. Yakshin, F. Bijkerk. Appl. Phys. Lett., 103, 093105(2013).

[9] P. V. Satyam, A. K. Balamurugan, A. K. Tyagi, N. C. Das. Appl. Surf. Sci., 214, 259(2003).

[10] M. Nayak, G. S. Lodha, R. V. Nandedkar, S. M. Chaudhari, P. Bhatt. J. Electron Spectrosc. Relat. Phenom., 152, 115(2006).

[11] M. G. Sertsu, M. Nardello, A. Giglia, A. J. Corso, C. Maurizio, L. Juschkin, P. Nicolosi. Appl. Opt., 54, 10351(2015).

[12] D. L. Windt. Comput. Phys., 12, 360(1998).

[13] S. Bajt, D. G. Stearns, P. A. Kearney. J. Appl. Phys., 90, 1017(2001).

[14] A. Neuhold, S. Fladischer, S. Mitsche, H. G. Flesch, A. Moser, J. Novak, R. Resel. J. Appl. Phys., 110, 114911(2011).

[15] S. Bruijn, R. W. E. Van de Kruijs, A. E. Yakshin, F. Bijkerk. Defect Diffus. Forum, 283, 657(2009).

[16] S. Yulin, T. Feigl, T. Kuhlmann, N. Kaiser, A. I. Fedorenko, V. V. Kondratenko, O. V. Poltseva, V. A. Sevryukova, A. Y. Zolotaryov, E. N. Zubarev. J. Appl. Phys., 92, 1216(2002).

[17] G. P. Halada, C. R. Clayton, H. Herman, S. Sampath, R. Tiwari. J. Electrochem. Soc., 142, 74(1995).

[18] J. M. Slaughter, A. Shapiro, P. A. Kearney, C. M. Falco. Phys. Rev. B, 44, 3854(1991).

[19] C. D. Wagner, D. E. Passoja, H. F. Hillery, T. G. Kinisky, H. A. Six, W. T. Jansen, J. A. Taylor. J. Vac. Sci. Technol., 21, 933(1982).

[20] S. Deng, H. Qi, K. Yi, Z. Fan, J. Shao. Appl. Surf. Sci., 255, 7434(2009).

CLP Journals

[1] Hui Shi, Yu Zhang, Hongqing Wang, Weitao Liu. Matrix formalism for radiating polarization sheets in multilayer structures of arbitrary composition[J]. Chinese Optics Letters, 2017, 15(8): 081901

Data from CrossRef

[1] Yao Shan, Guohang Hu, Maria Luisa Grilli, Hongbo He, Meiping Zhu, Yuanan Zhao, Jianda Shao. Measuring ultrathin metal coatings using SPR spectroscopic ellipsometry with a prism-dielectric-metal-liquid configuration. Optics Express, 27, 7912(2019).

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Jiaoling Zhao, Hongbo He, Hu Wang, Kui Yi, Bin Wang, Yun Cui. Interface characterization of Mo/Si multilayers[J]. Chinese Optics Letters, 2016, 14(8): 083401

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