Interface characterization of Mo/Si multilayers

Jiaoling Zhao; Hongbo He; Hu Wang; Kui Yi; Bin Wang; Yun Cui

doi:10.3788/COL201614.083401

Journals >Chinese Optics Letters >Volume 14 >Issue 8 >Page 083401 > Article

Chinese Optics Letters
Vol. 14, Issue 8, 083401 (2016)

Interface characterization of Mo/Si multilayers

Jiaoling Zhao^1、2, Hongbo He^1、*, Hu Wang^1、2, Kui Yi¹, Bin Wang^1、2, and Yun Cui¹

Author Affiliations

¹Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

²University of Chinese Academy of Sciences, Beijing 100049, China

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DOI: 10.3788/COL201614.083401 Cite this Article Set citation alerts

Jiaoling Zhao, Hongbo He, Hu Wang, Kui Yi, Bin Wang, Yun Cui. Interface characterization of Mo/Si multilayers[J]. Chinese Optics Letters, 2016, 14(8): 083401 Copy Citation Text

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Jiaoling Zhao, Hongbo He, Hu Wang, Kui Yi, Bin Wang, Yun Cui. Interface characterization of Mo/Si multilayers[J]. Chinese Optics Letters, 2016, 14(8): 083401

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