• Spectroscopy and Spectral Analysis
  • Vol. 31, Issue 11, 2891 (2011)
LI Shou-zhe*, WU Qi, XU Mao-chun, LI Hong, and WANG Yong-xing
Author Affiliations
  • [in Chinese]
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    DOI: 10.3964/j.issn.1000-0593(2011)11-2891-05 Cite this Article
    LI Shou-zhe, WU Qi, XU Mao-chun, LI Hong, WANG Yong-xing. Diagnostics of Atmospheric-Pressure Radio-Frequency Capacitively Coupled Ar/N2 Plasma by Optical Emission Spectroscopy[J]. Spectroscopy and Spectral Analysis, 2011, 31(11): 2891 Copy Citation Text show less

    Abstract

    An atmospheric-pressure Ar/N2 glow discharge was achieved in α mode stricken between bare metal plate electrodes by radio-frequency power supply at 13.56 MHz. The rotational temperature was determined by using the Boltzmann plot of the OH (A 2Σ+→X 2Π) radical and the variation tendency of the gas temperature versus the input power was obtained. Furthermore, the measurement of the sequences of vibrational bands of N2 second positive system (C 3Πu→B 3Πg) is made and the vibrational temperature was determined correspondingly. The experiment results showed that the emission peaks of N2 (C 3Πu) reached the maximum at the nitrogen flow rate of 80 mL·min-1 with increasing addition of nitrogen, the gas temperature increased from 342 to 523 K when the input power increased from 30 to 210 W, and the vibrational temperature changed slightly when the gas flow rate of nitrogen increased from 30 to 140 mL·min-1.
    LI Shou-zhe, WU Qi, XU Mao-chun, LI Hong, WANG Yong-xing. Diagnostics of Atmospheric-Pressure Radio-Frequency Capacitively Coupled Ar/N2 Plasma by Optical Emission Spectroscopy[J]. Spectroscopy and Spectral Analysis, 2011, 31(11): 2891
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