• Opto-Electronic Engineering
  • Vol. 43, Issue 4, 61 (2016)
LIU Ziqiang*, LEI Liang, LIU Xin, WANG Qi, YAN Runming, and ZHOU Jinyun
Author Affiliations
  • [in Chinese]
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    DOI: 10.3969/j.issn.1003-501x.2016.04.010 Cite this Article
    LIU Ziqiang, LEI Liang, LIU Xin, WANG Qi, YAN Runming, ZHOU Jinyun. Affine Transformation Optimal Matching Parameter Calculation Formula of Real-time Overlay Alignment[J]. Opto-Electronic Engineering, 2016, 43(4): 61 Copy Citation Text show less
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    LIU Ziqiang, LEI Liang, LIU Xin, WANG Qi, YAN Runming, ZHOU Jinyun. Affine Transformation Optimal Matching Parameter Calculation Formula of Real-time Overlay Alignment[J]. Opto-Electronic Engineering, 2016, 43(4): 61
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