[1] D. Malacara. Optical Shop Testing[M]. Canada: John Wiley & Sons, Inc., Publication, 2007. 361~375
[2] B. C. Platt, R. Shack. History and principles of Shack-Hartmann wavefront sensing[J]. J. Refractive Surgery, 2001, 17: S573~S577
[4] F. Zernike. Diffraction theory of knife-edge test and its improved form, the phase contrast method[J]. Monthly Noticer of the Royal Astronomical Society, 1934, 94: 377~384
[5] B. R. A. Nijboer. The diffraction theory of optical aberrations. part I: general discussion of the geometrical aberrations[J]. Physica, 1943, 10: 679~692
[6] Zhou Renzhong, Yon Jixiong. Theory of Adaptive Optics[M]. Beijing: Beijing Institute of Technology Press, 1996. 168~183
[9] L. Seifert, H. J. Tiziani, W. Osten. Wavefront reconstruction with the adaptive Shack-Hartmann sensor[J]. Opt. Commun., 2005, 245(1-6): 255~269
[11] Xu Weicai. Optical Design and Imaging Performance Compensation for the Lithographic Lens [D]. Changchun: Changchun Institute of Optics,Fine Machanics and Physics,Chinese Academy of Sciences, 2011. 87
[12] J. S. Lee, H. S. Yang, J. W. Hahn. Wavefront error measurement of high-numerical-aperture optics with a Shack-Hartmann sensor and a point source[J]. Appl. Opt., 2007, 46(9): 1411~1415
[14] Zhang Qiang, Jiang Wenhan, Xu Bing. Reconstruction of turbulent optical wavefront realized by Zernike polynomial[J]. Opto-Electronic Engineering, 1998, 25(6): 15~19