• Journal of Infrared and Millimeter Waves
  • Vol. 43, Issue 5, 603 (2024)
Yun-Peng LI1,2,4, Jia-Cheng LUO2,3,4, Ruo-Nan JI2,4, Mao-Bin XIE2,4,5..., Wen-Nan CUI2, Shao-Wei WANG2,4,5,*, Feng LIU3 and Wei LU1,2,4,5|Show fewer author(s)
Author Affiliations
  • 1School of Physical Science and Technology,ShanghaiTech University,Shanghai 201210,China
  • 2State Key Laboratory of Infrared Physics,Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200083,China
  • 3Department of Physics,Shanghai Normal University,Shanghai 200234,China
  • 4Shanghai Engineering Research Center of Energy-Saving Coatings,Shanghai 200083,China
  • 5University of Chinese Academy of Sciences,Beijing 100049,China
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    DOI: 10.11972/j.issn.1001-9014.2024.05.003 Cite this Article
    Yun-Peng LI, Jia-Cheng LUO, Ruo-Nan JI, Mao-Bin XIE, Wen-Nan CUI, Shao-Wei WANG, Feng LIU, Wei LU. Long wavelength infrared metalens fabricated by photolithography[J]. Journal of Infrared and Millimeter Waves, 2024, 43(5): 603 Copy Citation Text show less
    The meta-atoms of metalens:(a) Schematic diagram of designed meta-atoms; (b) The relationship between propagation phase and radius of meta-atoms in LWIR; (c) The transmission spectrum of meta-atoms in LWIR; (d) The electric field distribution of meta-atoms at wavelength of 9-11.5 μm
    Fig. 1. The meta-atoms of metalens:(a) Schematic diagram of designed meta-atoms; (b) The relationship between propagation phase and radius of meta-atoms in LWIR; (c) The transmission spectrum of meta-atoms in LWIR; (d) The electric field distribution of meta-atoms at wavelength of 9-11.5 μm
    The simulation results of metalens in 1 mm diameter:(a-c) Simulated focusing effect at the operating wavelength of the 9,10 and 10.5 μm for a metalens with a central wavelength of 10.5 μm; (d-f) Comparison of the surface phase distribution of the metalens at 9,10 and 10.5 μm. The dot plots are the theoretical surface phase distribution of the metalens with different operating wavelengths,and the error bar shows the deviation of the actual phase distribution
    Fig. 2. The simulation results of metalens in 1 mm diameter:(a-c) Simulated focusing effect at the operating wavelength of the 9,10 and 10.5 μm for a metalens with a central wavelength of 10.5 μm; (d-f) Comparison of the surface phase distribution of the metalens at 9,10 and 10.5 μm. The dot plots are the theoretical surface phase distribution of the metalens with different operating wavelengths,and the error bar shows the deviation of the actual phase distribution
    The fabrication of metalens:(a) Fabrication process flow diagram of the metalens; (b) Local view of the fabricated metalens; (c) Photograph of the fabricated metalens; (d) Full view of the surface of the metalens
    Fig. 3. The fabrication of metalens:(a) Fabrication process flow diagram of the metalens; (b) Local view of the fabricated metalens; (c) Photograph of the fabricated metalens; (d) Full view of the surface of the metalens
    Focusing performance test of the fabricated LWIR metalens:(a) Index path of experiment; (b) Simulation intensity of the focal plane; (c) Measured power intensity across the focal plane; (d) Intensity fitting of the focal spot. The original data are taken from (c);(e) Image of the focal spot along the axis of the metalens
    Fig. 4. Focusing performance test of the fabricated LWIR metalens:(a) Index path of experiment; (b) Simulation intensity of the focal plane; (c) Measured power intensity across the focal plane; (d) Intensity fitting of the focal spot. The original data are taken from (c);(e) Image of the focal spot along the axis of the metalens
    Metalens imaging experiment results:(a) Photograph of monitor; (b) Photograph of face; (c) Photograph of hands; (d) Photograph of fire
    Fig. 5. Metalens imaging experiment results:(a) Photograph of monitor; (b) Photograph of face; (c) Photograph of hands; (d) Photograph of fire
    Yun-Peng LI, Jia-Cheng LUO, Ruo-Nan JI, Mao-Bin XIE, Wen-Nan CUI, Shao-Wei WANG, Feng LIU, Wei LU. Long wavelength infrared metalens fabricated by photolithography[J]. Journal of Infrared and Millimeter Waves, 2024, 43(5): 603
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