• Microelectronics
  • Vol. 53, Issue 2, 333 (2023)
XIONG Juncheng1, HUANG Haimemg1、2、3, ZHANG Zimin4, and ZHANG Guoyi2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
  • 4[in Chinese]
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    DOI: 10.13911/j.cnki.1004-3365.220156 Cite this Article
    XIONG Juncheng, HUANG Haimemg, ZHANG Zimin, ZHANG Guoyi. Study on Avalanche Multiplication Factor of 4H-SiC p-n Junction Based on Accurate Impact Ionization Model[J]. Microelectronics, 2023, 53(2): 333 Copy Citation Text show less

    Abstract

    The avalanche multiplication effect is the key mechanism of 4H-SiC avalanche photodiodes and power semiconductor devices. As the most important physical parameter, the accurate analytical expression of avalanche multiplication factor (M) has not been reported. In this article, an analytical empirical formula of multiplication factor for 4H-SiC p-n junction was presented based on accurate theoretical methodology. Utilizing the accurate impact ionization model, the impact ionization integrals (I) of electron and hole for a 4H-SiC abrupt diode were calculated by MATLAB. The simulations were carried out by MEDICI to verify the theoretical results. Breakdown voltage (BV) as a function of doping concentration was established. Ulteriorly, the multiplication factor as a function of doping concentration and reversely-biased voltage was derived in an empirical form. The research on the relative error analysis on I indicates that a tiny relative error of the electric field could lead to a large relative error of I. For a wide range of BV, the empirical formula could achieve a high accuracy for VR larger than 0.65BV with relative error less than 5%.
    XIONG Juncheng, HUANG Haimemg, ZHANG Zimin, ZHANG Guoyi. Study on Avalanche Multiplication Factor of 4H-SiC p-n Junction Based on Accurate Impact Ionization Model[J]. Microelectronics, 2023, 53(2): 333
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