Cao Yuting, Wang Xiangzhao, Bu Yang. Fast Simulation Method for Contact Hole Mask in Extreme-Ultraviolet Lithography[J]. Acta Optica Sinica, 2012, 32(7): 705001
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Cao Yuting, Wang Xiangzhao, Bu Yang. Fast Simulation Method for Contact Hole Mask in Extreme-Ultraviolet Lithography[J]. Acta Optica Sinica, 2012, 32(7): 705001