• Journal of Semiconductors
  • Vol. 40, Issue 11, 111605 (2019)
Donghwi Cho1, Junyong Park2, Taehoon Kim1、3, and Seokwoo Jeon1
Author Affiliations
  • 1Department of Materials Science and Engineering, KAIST Institute for the NanoCentury, Korea Advanced Institute of Science and Technology (KAIST), Daejeon 34141, Republic of Korea
  • 2School of Materials Science and Engineering, Kumoh National Institute of Technology, Gumi, Gyeongbuk 39177, Republic of Korea
  • 3Department of Biomedical Engineering, Tufts University, Medford, Massachusetts, 02155, USA
  • show less
    DOI: 10.1088/1674-4926/40/11/111605 Cite this Article
    Donghwi Cho, Junyong Park, Taehoon Kim, Seokwoo Jeon. Recent advances in lithographic fabrication of micro-/nanostructured polydimethylsiloxanes and their soft electronic applications[J]. Journal of Semiconductors, 2019, 40(11): 111605 Copy Citation Text show less
    References

    [1] S Choi, S I Han, D Kim et al. High-performance stretchable conductive nanocomposites: materials, processes, and device applications. Chem Soc Rev, 48, 1566(2019).

    [2] K I Jang, H U Chung, S Xu et al. Soft network composite materials with deterministic and bio-inspired designs. Nat Commun, 6, 6566(2015).

    [3] S Lin, H Yuk, T Zhang et al. Stretchable hydrogel electronics and devices. Adv Mater, 28, 4497(2016).

    [4] H Liu, Q Li, S Zhang et al. Electrically conductive polymer composites for smart flexible strain sensors: a critical review. J Mater Chem C, 6, 12121(2018).

    [5] J Jeong, W H Yeo, A Akhtar et al. Materials and optimized designs for human-machine interfaces via epidermal electronics. Adv Mater, 25, 6839(2013).

    [6] S Jung, J Kim, J Kim et al. Reverse-micelle-induced porous pressure-sensitive rubber for wearable human–machine interfaces. Adv Mater, 26, 4825(2014).

    [7] R Guo, Y Yu, J Zeng et al. Biomimicking topographic elastomeric petals (e-petals) for omnidirectional stretchable and printable electronics. Adv Sci, 2, 1400021(2015).

    [8] J Kim, M Lee, H J Shim et al. Stretchable silicon nanoribbon electronics for skin prosthesis. Nat Commun, 5, 5747(2014).

    [9] H Lee, C Song, Y S Hong et al. Wearable/disposable sweat-based glucose monitoring device with multistage transdermal drug delivery module. Sci Adv, 3, e1601314(2017).

    [10] S Hong, H Lee, J Lee et al. Highly stretchable and transparent metal nanowire heater for wearable electronics applications. Adv Mater, 27, 4744(2015).

    [11] H Lee, T K Choi, Y B Lee et al. A graphene-based electrochemical device with thermoresponsive microneedles for diabetes monitoring and therapy. Nat Nanotechnol, 11, 566(2016).

    [12] M K Choi, J Yang, K Kang et al. Wearable red–green–blue quantum dot light-emitting diode array using high-resolution intaglio transfer printing. Nat Commun, 6, 7149(2015).

    [13] J H Koo, D C Kim, H J Shim et al. Flexible and stretchable smart display: materials, fabrication, device design, and system integration. Adv Funct Mater, 28, 1801834(2018).

    [14] K Li, Y Zhang, H Zhen et al. Versatile biomimetic haze films for efficiency enhancement of photovoltaic devices. J Mater Chem A, 5, 969(2017).

    [15] T Kim, J Park, J Sohn et al. Bioinspired, highly stretchable, and conductive dry adhesives based on 1D–2D hybrid carbon nanocomposites for all-in-one ECG electrodes. ACS Nano, 10, 4770(2016).

    [16] S W Hwang, C H Lee, H Cheng et al. Biodegradable elastomers and silicon nanomembranes/nanoribbons for stretchable, transient electronics, and biosensors. Nano Lett, 15, 2801(2015).

    [17] W H Yeo, Y S Kim, J Lee et al. Multifunctional epidermal electronics printed directly onto the skin. Adv Mater, 25, 2773(2013).

    [18] D Son, J Lee, S Qiao et al. Multifunctional wearable devices for diagnosis and therapy of movement disorders. Nat Nanotechnol, 9, 397(2014).

    [19] J Park, Y Lee, J Hong et al. Giant tunneling piezoresistance of composite elastomers with interlocked microdome arrays for ultrasensitive and multimodal electronic skins. ACS Nano, 8, 4689(2014).

    [20] H Park, Y R Jeong, J Yun et al. Stretchable array of highly sensitive pressure sensors consisting of polyaniline nanofibers and Au-coated polydimethylsiloxane micropillars. ACS Nano, 9, 9974(2015).

    [21] M Amjadi, A Pichitpajongkit, S Lee et al. Highly stretchable and sensitive strain sensor based on silver nanowire–elastomer nanocomposite. ACS Nano, 8, 5154(2014).

    [22] B U Hwang, J H Lee, T Q Trung et al. Transparent stretchable self-powered patchable sensor platform with ultrasensitive recognition of human activities. ACS Nano, 9, 8801(2015).

    [23] J Park, S Wang, M Li et al. Three-dimensional nanonetworks for giant stretchability in dielectrics and conductors. Nat Commun, 3, 916(2012).

    [24] D Cho, J Park, J Kim et al. Three-dimensional continuous conductive nanostructure for highly sensitive and stretchable strain sensor. ACS Appl Mater Interfaces, 9, 17369(2017).

    [25] T Yamada, Y Hayamizu, Y Yamamoto et al. A stretchable carbon nanotube strain sensor for human-motion detection. Nat Nanotechnol, 6, 296(2011).

    [26] D J Lipomi, M Vosgueritchian, B C Tee et al. Skin-like pressure and strain sensors based on transparent elastic films of carbon nanotubes. Nat Nanotechnol, 6, 788(2011).

    [27] N Lu, C Lu, S Yang et al. Highly sensitive skin-mountable strain gauges based entirely on elastomers. Adv Funct Mater, 22, 4044(2012).

    [28] S Xu, Z Yan, K I Jang et al. Assembly of micro/nanomaterials into complex, three-dimensional architectures by compressive buckling. Science, 347, 154(2015).

    [29] J Kim, D Son, M Lee et al. A wearable multiplexed silicon nonvolatile memory array using nanocrystal charge confinement. Sci Adv, 2, e1501101(2016).

    [30] J Lee, B Yoo, H Lee et al. Ultra-wideband multi-dye-sensitized upconverting nanoparticles for information security application. Adv Mater, 29, 1603169(2017).

    [31] J K Song, D Son, J Kim et al. Wearable force touch sensor array using a flexible and transparent electrode. Adv Funct Mater, 27, 1605286(2017).

    [32] C Yan, W Kang, J Wang et al. Stretchable and wearable electrochromic devices. ACS Nano, 8, 316(2013).

    [33] K Park, D K Lee, B S Kim et al. Stretchable, transparent zinc oxide thin film transistors. Adv Funct Mater, 20, 3577(2010).

    [34] D H Kim, J H Ahn, W M Choi et al. Stretchable and foldable silicon integrated circuits. Science, 320, 507(2008).

    [35] S Y Kim, J H Bong, C Kim et al. Mechanical stability analysis via neutral mechanical plane for high-performance flexible si nanomembrane fdsoi device. Adv Mater Interfaces, 4, 1700618(2017).

    [36] M Kaltenbrunner, T Sekitani, J Reeder et al. An ultra-lightweight design for imperceptible plastic electronics. Nature, 499, 458(2013).

    [37] J A Rogers, T Someya, Y Huang. Materials and mechanics for stretchable electronics. Science, 327, 1603(2010).

    [38] Y Lin, S Liu, L Liu. A new approach to construct three dimensional segregated graphene structures in rubber composites for enhanced conductive, mechanical and barrier properties. J Mater Chem C, 4, 2353(2016).

    [39] D Zhu, S Handschuh-Wnag, X Zhou. Recent progress in fabrication and application of polydimethylsiloxane sponges. J Mater Chem A, 5, 16467(2017).

    [40] S J Choi, T H Kwon, H Im et al. A polydimethylsiloxane (pdms) sponge for the selective absorption of oil from water. ACS Appl Mater Interfaces, 3, 4552(2011).

    [41] W Liu, Z Chen, G Zhou et al. 3D porous sponge-inspired electrode for stretchable lithium-ion batteries. Adv Mater, 28, 3578(2016).

    [42] Y I Y Emel. Silicone containing copolymers: Synthesis, properties and applications. Prog Polym Sci, 39, 11951165(2014).

    [43] D Y Khang, H Jiang, Y Huang et al. A stretchable form of single-crystal silicon for high-performance electronics on rubber substrates. Science, 311, 208(2006).

    [44] T Sekitani, Y Noguchi, K Hata et al. A rubberlike stretchable active matrix using elastic conductors. Science, 321, 1468(2008).

    [45] K Y Chun, Y Oh, J Rho et al. Highly conductive, printable and stretchable composite films of carbon nanotubes and silver. Nat Nanotechnol, 5, 853(2010).

    [46] T Li, Z Huang, Z Suo. Stretchability of thin metal films on elastomer substrates. Appl Phys Lett, 85, 3435(2004).

    [47] T Lin, X Dong, S Liu et al. Graphene−elastomer composites with segregated nanostructured network for liquid and strain sensing application. ACS Appl Mater Interfaces, 8, 24143(2016).

    [48] B Huyghe, H Rogier, J Vanfleteren et al. Design and manufacturing of stretchable high-frequency interconnects. IEEE Trans Adv Packag, 31, 802(2008).

    [49] S R Quake, A Scherer. From micro- to nanofabrication with soft materials. Science, 290, 1536(2000).

    [50] K S Ryu, X Wang, K Shaikh et al. A method for precision patterning of silicone elastomer and its applications. J Microelectromech Syst, 13, 568(2004).

    [51] W Chen, R H W Lam, J Fu. Photolithographic surface micromachining of polydimethylsiloxane (pdms). Lab Chip, 12, 391(2012).

    [52] S Hu, X Ren, M Bachman et al. Tailoring the surface properties of poly(dimethylsiloxane) microfluidic devices. Langmuir, 20, 5569(2004).

    [53] W A C Bauer, M Fischlechner, C Abell et al. Hydrophilic pdms microchannels for high-throughput formation of oil-in-water microdroplets and water-in-oil-in-water double emulsions. Lab Chip, 10, 1814(2010).

    [54] R M Diebold, D R Clarke. Lithographic patterning on polydimethylsiloxane surfaces using polydimethylglutarimide. Lab Chip, 11, 1694(2011).

    [55] J C Lötters, W Olthuis, P H Veltink et al. The mechanical properties of the rubber elastic polymer polydimethylsiloxane for sensor applications. J Micromech Microeng, 7, 145(1997).

    [56] M Almasri, W Zhang, A Kine et al. Tunable infrared filter based on elastic polymer springs. Proc SPIE, 5770, 190(2005).

    [57] A A S Bhagat, P Jothimuthu, I Papautsky. Photodefinable polydimethylsiloxane (pdms) for rapid lab-on-a-chip prototyping. Lab Chip, 7, 1192(2007).

    [58] J H Ward, R Bashir, N A Peppas. Micropatterning of biomedical polymer surfaces by novel UV polymerization techniques. J Biol Mater Res banner, 56, 351(2001).

    [59] C Iojoiu, M J M Abadie, V Harabagiu et al. Synthesis and photocrosslinking of benzyl acrylate substituted polydimethylsiloxanes. Eur Polym J, 36, 2115(2000).

    [60] B Harkness, G B Gardner, J S Alger et al. Photopatternable silicone compositions for electronic packaging applications. Proc SPIE, 5376, 517(2004).

    [61] H Cong, T Pan. Photopatternable conductive pdms materials for microfabrication. Adv Funct Mater, 18, 1912(2008).

    [62] S P Desai, B M Taff, J Voldman. A photopatternable silicone for biological applications. Langmuir, 24, 575(2007).

    [63] S K Kuk, Y Ham, K Gopinath et al. Continuous 3D titanium nitride nanoshell structure for solar-driven unbiased biocatalytic CO2 reduction. Adv Energy Mater, 1900029(2019).

    [64] G Hyun, S H Cho, J Park et al. 3D ordered carbon/SnO2 hybrid nanostructures for energy storage applications. Electrochim Acta, 288, 108(2018).

    [65] S Jeon, J U Park, R Cirelli et al. Fabricating complex three-dimensional nanostructures with high-resolution conformable phase masks. Proc Natl Acad Sci USA, 101, 12428(2004).

    [66] J Park, K I Kim, K Kim et al. Rapid, high-resolution 3D interference printing of multilevel ultralong nanochannel arrays for high-throughput nanofluidic transport. Adv Mater, 27, 8000(2015).

    [67] D J Shir, S Jeon, H Liao et al. Three-dimensional nanofabrication with elastomeric phase masks. J Phys Chem B, 111, 12945(2007).

    [68] S Jeon, D J Shir, Y S Nam et al. Molded transparent photopolymers and phase shift optics for fabricating three dimensional nanostructures. Opt Express, 15, 6358(2007).

    [69] J Park, S Yoon, K Kang et al. Antireflection behavior of multidimensional nanostructures patterned using a conformable elastomeric phase mask in a single exposure step. Small, 6, 19811981(2010).

    [70] J Park, J H Park, E Kim et al. Conformable solid-index phase masks composed of high-aspect-ratio micropillar arrays and their application to 3D nanopatterning. Adv Mater, 23, 860(2011).

    [71] C Ahn, J Park, D Kim et al. Monolithic 3D titania with ultrathin nanoshell structures for enhanced photocatalytic activity and recyclability. Nanoscale, 5, 10384(2013).

    [72] J K Hyun, J Park, E Kim et al. Rational control of diffraction and interference from conformal phase gratings: toward high-resolution 3D nanopatterning. Adv Opt Mater, 2, 1213(2014).

    [73] Y W Kwon, J Park, T Kim et al. Flexible near-field nanopatterning with ultrathin, conformal phase masks on nonplanar substrates for biomimetic hierarchical photonic structures. ACS Nano, 10, 4609(2016).

    [74] J Park, J Seo, H K Jung et al. Direct optical fabrication of fluorescent, multilevel 3D nanostructures for highly efficient chemosensing platforms. Adv Funct Mater, 26, 7170(2016).

    [75] S Cho, C Ahn, J Park et al. 3D nanostructured n-doped TiO2 photocatalysts with enhanced visible absorption. Nanoscale, 10, 9747(2018).

    [76] S Yang, J Ford, C Ruengruglikit et al. Synthesis of photoacid crosslinkable hydrogels for the fabrication of soft, biomimetic microlens arrays. J Mater Chem, 15, 4200(2005).

    [77] C K Ullal, M Maldovan, E L Thomas. Photonic crystals through holographic lithography: Simple cubic, diamond-like, and gyroid-like structures. Appl Phy Lett, 84, 5434(2004).

    [78] J H Jang, C K Ullal, T Gorishnyy et al. Mechanically tunable three-dimensional elastomeric network/air structures via interference lithography. Nano Lett, 6, 740(2006).

    [79] J H Jang, C K Ullal, M Maldovan et al. 3D micro- and nanostructures via interference lithography. Adv Funct Mater, 17, 3027(2007).

    [80] J H Jang, D Dendukuri, T A Hatton et al. A route to three-dimensional structures in a microfluidic device:stop-flow interference lithography. Angew Chem, 46, 9027(2007).

    [81] M Campbell, D N Sharp, M T Harrison et al. Fabrication of photonic crystals for the visible spectrum by holographic lithography. Nature, 404, 5353(2000).

    [82] S Kim, C Ahn, Y Cho et al. Suppressing buoyant force: New avenue for long-term durability of oxygen evolution catalysts. Nano Energy, 54, 184(2018).

    [83] K Lee, H Yoon, C Ahn et al. Strategies to improve the photocatalytic activity of TiO2: 3D nanostructuring and heterostructuring with graphitic carbon nanomaterials. Nanoscale, 11, 7025(2019).

    [84] H Park, C Ahn, H Jo et al. Large-area metal foams with highly ordered sub-micrometer-scale pores for potential applications in energy areas. Mater Lett, 129, 174(2014).

    [85] J N Lee, C Park, G M Whitesides. Solvent compatibility of poly(dimethylsiloxane)-based microfluidic devices. Anal Chem, 75, 6544(2003).

    [86] K Kim, J Park, S Hong et al. Anomalous thermoelectricity of pure ZnO from 3D continuous ultrathin nanoshell structures. Nanoscale, 10, 3046(2018).

    [87] Y E Na, D Shin, K Kim et al. Emergence of new density-strength scaling law in 3D hollow ceramic nanoarchitectures. Small, 14, e1802239(2018).

    [88] J Ahn, C Ahn, S Jeon et al. Atomic layer deposition of inorganic thin films on 3D polymer nanonetworks. Appl Sci, 9, 1990(2019).

    [89] S Araki, Y Ishikawa, X Wang et al. Fabrication of nanoshell-based 3D periodic structures by templating process using solution-derived ZnO. Nanoscale Res Lett, 12, 419(2017).

    [90] F Ejserholm, J Stegmayr, P Bauer et al. Biocompatibility of a polymer based on off-stoichiometry thiol-enes + epoxy (oste+) for neural implants. Biomater Res, 19, 19(2015).

    [91] I Divliansky, T S Mayer. Fabrication of three-dimensional polymer photonic crystal structures using single diffraction element interference lithography. Appl Phys Lett, 82, 1667(2003).

    [92] A C Leon, Q Chen, N B Palaganas et al. High performance polymer nanocomposites for additive manufacturing applications. React Funct Polym, 103, 141(2016).

    [93] D B Kolesky, R L Truby, A S Gladman et al. 3D bioprinting of vascularized, heterogeneous cell-laden tissue constructs. Adv Mater, 26, 3124(2014).

    [94] D B Koleskya, K A Homan, M A Skylar-Scott et al. Three-dimensional bioprinting of thick vascularized tissues. Proc Natl Acad Sci USA, 113, 3179(2016).

    [95] J K Kim, K Taki, M Ohshima. Preparation of a unique microporous structure via two step phase separation in the course of drying a ternary polymer solution. Langmuir, 23, 12397(2007).

    [96] J Z Manapat, Q Chen, P Ye et al. 3D printing of polymer nanocomposites via stereolithography. Macromol Mater Eng, 302, 1600553(2017).

    [97] Juan Lv, Z Gong, Z He et al. 3D printing of a mechanically durable superhydrophobic porous membrane for oil–water separation. J Mater Chem A, 5, 12435(2017).

    [98] Q Chen, J D Mangadlao, J Wallat et al. 3D printing biocompatible polyurethane/poly(lactic acid)/graphene oxide nanocomposites: anisotropic properties. ACS Appl Mater Interfaces, 9, 4015(2017).

    [99] Z Qin, B G Compton, J A Lewis et al. Structural optimization of 3D-printed synthetic spider webs for high strength. Nat Commun, 6, 7038(2015).

    [100] Q Chen, P F Cao, R C Advincula. Mechanically robust, ultraelastic hierarchical foam with tunable properties via 3D printing. Adv Funct Mater, 28, 1800631(2018).

    [101] E B Duoss, T H Weisgraber, K Hearon et al. Three-dimensional printing of elastomeric, cellular architectures with negative stiffness. Adv Funct Mater, 24, 4905(2014).

    [102] A H E Jr Espera, A D Valino, J O Palaganas et al. 3D printing of a robust polyamide-12-carbon black composite via selective laser sintering: thermal and electrical conductivity. Macromol Mater Eng, 304, 1800718(2019).

    [103] S Duan, K Yang, Z Wang et al. Fabrication of highly stretchable conductors based on 3D printed porous poly(dimethylsiloxane) and conductive carbon nanotubes/graphene network. ACS Appl Mater Interfaces, 8, 2187(2016).

    [104] Q Chen, J Zhao, J Ren et al. 3D printed multifunctional, hyperelastic silicone rubber foam. Adv Funct Mater, 29, 1900469(2019).

    [105] F Huo, Z Zheng, G Zheng et al. Polymer pen lithography. Science, 321, 1658(2008).

    [106] F Huo, G Zheng, X Liao et al. Beam pen lithography. Nat Nanotechnol, 5, 637(2010).

    [107] Z Zheng, J W Jang, G Zheng et al. Topographically flat, chemically patterned PDMS stamps made by dip-pen nanolithography. Angew Chem Int Ed, 47, 9951(2008).

    [108] R D Piner, Jin Zhu, Feng Xu et al. Dip-pen nanolithography. Science, 283, 661(1999).

    [109] Y Tang, Z Zhao, H Hu et al. Highly stretchable and ultrasensitive strain sensor based on reduced graphene oxide microtubes-elastomer composite. ACS Appl Mater Interfaces, 7, 27432(2015).

    [110] C Yan, J Wang, W Kang et al. Highly stretchable piezoresistive graphene-nanocellulose nanopaper for strain sensors. Adv Mater, 26, 2022(2014).

    [111] E Roh, B U Hwang, D Kim et al. Stretchable, transparent, ultrasensitive, and patchable strain sensor for human-machine interfaces comprising a nanohybrid of carbon nanotubes and conductive elastomers. ACS Nano, 9, 6252(2015).

    [112] J Shi, X Li, H Cheng et al. Graphene reinforced carbon nanotube networks for wearable strain sensors. Adv Funct Mater, 26, 2078(2016).

    [113] J Seo, T J Lee, C Lim et al. A highly sensitive and reliable strain sensor using a hierarchical 3D and ordered network of carbon nanotubes. Small, 11, 2990(2015).

    [114] Q Fan, Z Qin, S Gao et al. The use of a carbon nanotube layer on a polyurethane multifilament substrate for monitoring strains as large as 400%. Carbon, 50, 4085(2012).

    [115] S Ryu, P Lee, J B Chou et al. Extremely elastic wearable carbon nanotube fiber strain sensor for monitoring of human motion. ACS Nano, 9, 5929(2015).

    [116] S Wang, X Zhang, X Wu et al. Tailoring percolating conductive networks of natural rubber composites for flexible strain sensors via a cellulose nanocrystal templated assembly. Soft Matter, 12, 845(2016).

    [117] S J Park, J Kim, M Chu et al. Highly flexible wrinkled carbon nanotube thin film strain sensor to monitor human movement. Adv Mater Technol, 1, 1600053(2016).

    [118] M Amjadi, Y J Yoon, I Park. Ultra-stretchable and skin-mountable strain sensors using carbon nanotubes-ecoflex nanocomposites. Nanotechnology, 26, 375501(2015).

    [119] M Bariya, H Y Y Nyein, A Javey. Wearable sweat sensors. Nature Electron, 1, 160(2018).

    [120] J Heikenfeld, A Jajack, J Rogers et al. Wearable sensors: modalities, challenges, and prospects. Lab Chip, 18, 217(2018).

    [121] K Autumn, M Sitti, Y A Liang et al. Evidence for van der Waals adhesion in gecko setae. Proc Natl Acad Sci USA, 99, 12252(2002).

    [122] M K Kwak, H E Jeong, K Y Suh. Rational design and enhanced biocompatibility of a dry adhesive medical skin patch. Adv Mater, 23, 3949(2011).

    [123] W G Bae, D Kim, M K Kwak et al. Enhanced skin adhesive patch with modulus-tunable composite micropillars. Adv Health Mater, 2, 109(2013).

    [124] M K Choi, O K Park, C Choi et al. Cephalopod-inspired miniaturized suction cups for smart medical skin. Adv Health Mater, 5, 80(2016).

    [125] H Lee, D S Um, Y Lee et al. Octopus-inspired smart adhesive pads for transfer printing of semiconducting nanomembranes. Adv Mater, 28, 7457(2016).

    [126] S Chun, D W Kim, S Baik et al. Conductive and stretchable adhesive electronics with miniaturized octopus-like suckers against dry/wet skin for biosignal monitoring. Adv Funct Mater, 28, 1805224(2018).

    [127] L Wang, K H Ha, S Qiao et al. Suction effects of crater arrays. Extreme Mech Lett, 30, 100496(2019).

    [128] D W Kim, S Baik, H Min et al. Highly permeable skin patch with conductive hierarchical architectures inspired by amphibians and octopi for omnidirectionally enhanced wet adhesion. Adv Funct Mater, 29, 1807614(2019).

    [129] C Cao, H F Chan, J Zang et al. Harnessing localized ridges for high-aspect-ratio hierarchical patterns with dynamic tunability and multifunctionality. Adv Mater, 26, 1763(2014).

    [130] D Ge, E Lee, L Yang et al. A robust smart window: reversibly switching from high transparency to angle-independent structural color display. Adv Mater, 27, 2489(2015).

    [131] E Lee, M Zhang, Y Cho et al. Tilted pillars on wrinkled elastomers as a reversibly tunable optical window. Adv Mater, 26, 4127(2014).

    [132] G Lin, P Chandrasekaran, C Lv et al. Self-similar hierarchical wrinkles as a potential multifunctional smart window with simultaneously tunable transparency, structural color, and droplet transport. ACS Appl Mater Interfaces, 9, 26510(2017).

    [133] H Xu, C Yu, S Wang et al. Deformable, programmable, and shape-memorizing micro-optics. Adv Funct Mater, 23, 3299(2013).

    [134] H N Kim, D Ge, E Lee et al. Multistate and on-demand smart windows. Adv Mater, 30, e1803847(2018).

    [135] J M Taylor, C Argyropoulos, S A Morin. Soft surfaces for the reversible control of thin-film microstructure and optical reflectance. Adv Mater, 28, 2595(2016).

    [136] J Zang, S Ryu, N Pugno et al. Multifunctionality and control of the crumpling and unfolding of large-area graphene. Nat Mater, 12, 321(2013).

    [137] P Kim, Y Hu, J Alvarenga et al. Rational design of mechano-responsive optical materials by fine tuning the evolution of strain-dependent wrinkling patterns. Adv Opt Mater, 1, 381(2013).

    [138] S G Lee, D Y Lee, H S Lim et al. Switchable transparency and wetting of elastomeric smart windows. Adv Mater, 22, 5013(2010).

    [139] S Zeng, D Zhang, W Huang et al. Bio-inspired sensitive and reversible mechanochromisms via strain-dependent cracks and folds. Nat Commun, 7, 11802(2016).

    [140] J Park, Y Lee, M H Barbee et al. A hierarchical nanoparticle-in-micropore architecture for enhanced mechanosensitivity and stretchability in mechanochromic electronic skins. Adv Mater, 31, 1808148(2019).

    [141] A Azam, J Kim, J Park et al. Two-dimensional WO3 nanosheets chemically converted from layered WS2 for high-performance electrochromic devices. Nano Lett, 18, 5646(2018).

    [142] C J Barile, D J Slotcavage, J Hou et al. Dynamic windows with neutral color, high contrast, and excellent durability using reversible metal electrodeposition. Joule, 1, 133(2017).

    [143] X H Li, C Liu, S P Feng et al. Broadband light management with thermochromic hydrogel microparticles for smart windows. Joule, 3, 290(2019).

    [144] M Kamalisarvestani, R Saidur, S Mekhilef et al. Performance, materials and coating technologies of thermochromic thin films on smart windows. Renew Sust Energ Rev, 26, 353(2013).

    [145] L Y L Wu, Q Zhao, H Huang et al. Sol-gel based photochromic coating for solar responsive smart window. Surf Coat Tech, 320, 601(2017).

    [146] J Lin, M Lai, L Dou et al. Thermochromic halide perovskite solar cells. Nat Mater, 17, 261(2018).

    [147] P Coliaie, M S Kelkar, N K Nere et al. Continuous-flow, well-mixed, microfluidic crystallization device for screening of polymorphs, morphology, and crystallization kinetics at controlled supersaturation. Lab Chip, 19, 2373(2019).

    Donghwi Cho, Junyong Park, Taehoon Kim, Seokwoo Jeon. Recent advances in lithographic fabrication of micro-/nanostructured polydimethylsiloxanes and their soft electronic applications[J]. Journal of Semiconductors, 2019, 40(11): 111605
    Download Citation