Extremely regular periodic surface structures in a large area efficiently induced on silicon by temporally shaped femtosecond laser

Yuchan Zhang; Qilin Jiang; Kaiqiang Cao; Tianqi Chen; Ke Cheng; Shian Zhang; Donghai Feng; Tianqing Jia; Zhenrong Sun; Jianrong Qiu

doi:10.1364/PRJ.418937

Journals >Photonics Research >Volume 9 >Issue 5 >Page 839 > Article

Photonics Research
Vol. 9, Issue 5, 839 (2021)

Extremely regular periodic surface structures in a large area efficiently induced on silicon by temporally shaped femtosecond laser | On the Cover

Yuchan Zhang¹, Qilin Jiang¹, Kaiqiang Cao¹, Tianqi Chen¹, Ke Cheng¹, Shian Zhang¹, Donghai Feng¹, Tianqing Jia^1、2、*, Zhenrong Sun¹, and Jianrong Qiu³

Author Affiliations

¹State Key Laboratory of Precision Spectroscopy, School of Physics and Materials Science, East China Normal University, Shanghai 200062, China

²Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan 030006, China

³State Key Laboratory of Optical Instrumentation, Zhejiang University, Hangzhou 310027, China

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DOI: 10.1364/PRJ.418937 Cite this Article Set citation alerts

Yuchan Zhang, Qilin Jiang, Kaiqiang Cao, Tianqi Chen, Ke Cheng, Shian Zhang, Donghai Feng, Tianqing Jia, Zhenrong Sun, Jianrong Qiu. Extremely regular periodic surface structures in a large area efficiently induced on silicon by temporally shaped femtosecond laser[J]. Photonics Research, 2021, 9(5): 839 Copy Citation Text

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