Extremely regular periodic surface structures in a large area efficiently induced on silicon by temporally shaped femtosecond laser

Yuchan Zhang; Qilin Jiang; Kaiqiang Cao; Tianqi Chen; Ke Cheng; Shian Zhang; Donghai Feng; Tianqing Jia; Zhenrong Sun; Jianrong Qiu

doi:10.1364/PRJ.418937

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