• Photonics Research
  • Vol. 9, Issue 6, 937 (2021)
Kaiyu Cui1、2、†,*, Zhilei Huang1、†, Ning Wu1、2, Qiancheng Xu1、2, Fei Pan1、2, Jian Xiong1、2, Xue Feng1、2, Fang Liu1、2, Wei Zhang1、2、3, and Yidong Huang1、2、3
Author Affiliations
  • 1Department of Electronic Engineering, Tsinghua University, Beijing 100084, China
  • 2Beijing National Research Center for Information Science and Technology (BNRist), Tsinghua University, Beijing 100084, China
  • 3Beijing Academy of Quantum Information Science, Beijing, China
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    DOI: 10.1364/PRJ.403833 Cite this Article Set citation alerts
    Kaiyu Cui, Zhilei Huang, Ning Wu, Qiancheng Xu, Fei Pan, Jian Xiong, Xue Feng, Fang Liu, Wei Zhang, Yidong Huang. Phonon lasing in a hetero optomechanical crystal cavity[J]. Photonics Research, 2021, 9(6): 937 Copy Citation Text show less

    Abstract

    Micro- and nanomechanical resonators have emerged as promising platforms for sensing a broad range of physical properties, such as mass, force, torque, magnetic field, and acceleration. The sensing performance relies critically on the motional mass, mechanical frequency, and linewidth of the mechanical resonator. Herein, we demonstrate a hetero optomechanical crystal (OMC) cavity based on a silicon nanobeam structure. The cavity supports phonon lasing in a fundamental mechanical mode with a frequency of 5.91 GHz, an effective mass of 116 fg, and a mechanical linewidth narrowing in the range from 3.3 MHz to 5.2 kHz, while the optomechanical coupling rate is as high as 1.9 MHz. With this phonon laser, on-chip sensing can be predicted with a resolution of δλ/λ=1.0×10-8. The use of a silicon-based hetero OMC cavity that harnesses phonon lasing could pave the way toward high-precision sensors that allow silicon monolithic integration and offer unprecedented sensitivity for a broad range of physical sensing applications.

    dλdetdfm=dλdetdT×dTdλin×dλindfm,

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    σ(mτ0)=12(N2m+1)j=1N2m+1[i=jj+m1(fi+mfim)]2,

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    Kaiyu Cui, Zhilei Huang, Ning Wu, Qiancheng Xu, Fei Pan, Jian Xiong, Xue Feng, Fang Liu, Wei Zhang, Yidong Huang. Phonon lasing in a hetero optomechanical crystal cavity[J]. Photonics Research, 2021, 9(6): 937
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