• Laser & Optoelectronics Progress
  • Vol. 60, Issue 3, 0312007 (2023)
Shulian Zhang* and Yuan Yang
Author Affiliations
  • State Key Laboratory of Precision Measurement Technology and Instruments, Tsinghua University, Beijing 100084, China
  • show less
    DOI: 10.3788/LOP223349 Cite this Article Set citation alerts
    Shulian Zhang, Yuan Yang. Research on the Key Technologies of Microchip Laser Common-Path Frequency-Modulation Feedback Interferometer[J]. Laser & Optoelectronics Progress, 2023, 60(3): 0312007 Copy Citation Text show less
    References

    [1] Wang W M, Grattan K T V, Palmer A W et al. Self-mixing interference inside a single-mode diode laser for optical sensing applications[J]. Journal of Lightwave Technology, 12, 1577-1587(1994).

    [2] Liu G. Double optical feedback theory in HeNe laser and optical feedback in birefringent cavity[D](2005).

    [3] Otsuka K, Abe K, Ko J Y et al. Real-time nanometer-vibration measurement with a self-mixing microchip solid-state laser[J]. Optics Letters, 27, 1339-1341(2002).

    [4] Abe K, Otsuka K, Ko J Y. Self-mixing laser Doppler vibrometry with high optical sensitivity: application to real-time sound reproduction[J]. New Journal of Physics, 5, 1-9(2003).

    [5] Li F L[M]. Advanced laser physics(1992).

    [6] Lacot E, Hugon O. Phase-sensitive laser detection by frequency-shifted optical feedback[J]. Physical Review A, 70, 053824(2004).

    [7] Xu L. Research on the key technology of remote compensation and high-speed measurement of the microchip laser feedback interferometer[D](2017).

    [8] Ren Z, Wan X J, Tan Y D et al. Dynamic response of optical feedback in orthogonally polarized microchip Nd∶YAG laser based on optical feedback rate equation[J]. Applied Physics B, 99, 469-475(2010).

    [9] Chen H, Zhang S L. Microchip Nd∶YAG dual-frequency laser interferometer for displacement measurement[J]. Optics Express, 29, 6248-6256(2021).

    [10] Ren Z, Li D, Wan X et al. Quasi-common-path microchip laser feedback interferometry with a high stability and accuracy[J]. Laser Physics, 18, 939-946(2008).

    [11] Zhang S H, Zhang S L, Tan Y D et al. Self-mixing interferometry with mutual independent orthogonal polarized light[J]. Optics Letters, 41, 844-846(2016).

    [12] Xu L, Tan Y D, Zhang S L. Full path compensation laser feedback interferometry for remote sensing with recovered nanometer resolutions[J]. The Review of Scientific Instruments, 89, 033108(2018).

    [13] Wang W P. Research on feedback confocal system and application of microchip Nd∶YVO4 laser[D](2015).

    [14] Tan Y D, Wang W P, Xu C X et al. Laser confocal feedback tomography and nano-step height measurement[J]. Scientific Reports, 3, 2971(2013).

    [15] Wang W P, Zhang S L, Li Y. Surface microstructure profilometry based on laser confocal feedback[J]. The Review of Scientific Instruments, 86, 103108(2015).

    [16] Wang W P, Tan Y D, Zhang S L et al. Microstructure measurement based on frequency-shift feedback in a-cut Nd∶YVO4 laser[J]. Chinese Optics Letters, 13, 121201-121205(2015).

    [17] Xu C X, Zhang S L, Tan Y D et al. Inner structure detection by optical tomography technology based on feedback of microchip Nd∶YAG lasers[J]. Optics Express, 21, 11819-11826(2013).

    [18] Xu C X, Tan Y D, Zhang S L et al. The structure measurement of micro-electro-mechanical system devices by the optical feedback tomography technology[J]. Applied Physics Letters, 102, 221902(2013).

    [19] Guo B, Qin S J, Tan Y D. Remote vibration measurement based on Nd∶YVO4 laser feedback system[J]. Journal of Optoelectronics·Laser, 27, 298-302(2016).

    [20] Zhu K Y, Guo B, Lu Y Y et al. Single-spot two-dimensional displacement measurement based on self-mixing interferometry[J]. Optica, 4, 729-735(2017).

    [21] Zheng F S, Tan Y D, Lin J et al. Study of non-contact measurement of the thermal expansion coefficients of materials based on laser feedback interferometry[J]. The Review of Scientific Instruments, 86, 043109(2015).

    [22] Xu L, Zhang S L, Tan Y D et al. Simultaneous measurement of refractive-index and thickness for optical materials by laser feedback interferometry[J]. The Review of Scientific Instruments, 85, 083111(2014).

    [23] Zhang S H, Zhang S L, Sun L Q et al. Fiber self-mixing interferometer with orthogonally polarized light compensation[J]. Optics Express, 24, 26558-26564(2016).

    Shulian Zhang, Yuan Yang. Research on the Key Technologies of Microchip Laser Common-Path Frequency-Modulation Feedback Interferometer[J]. Laser & Optoelectronics Progress, 2023, 60(3): 0312007
    Download Citation