• Laser & Optoelectronics Progress
  • Vol. 60, Issue 5, 0518001 (2023)
Muwang Huang1、2, Xu Liu1、*, and Faguan Lin2
Author Affiliations
  • 1College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, Zhejiang, China
  • 2Foctek Photonics, Inc., Fuzhou 350100, Fujian, China
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    DOI: 10.3788/LOP220458 Cite this Article Set citation alerts
    Muwang Huang, Xu Liu, Faguan Lin. Design of Large Field of View and High Numerical Aperture Microscope Objective[J]. Laser & Optoelectronics Progress, 2023, 60(5): 0518001 Copy Citation Text show less
    Initial system structure
    Fig. 1. Initial system structure
    Final design result
    Fig. 2. Final design result
    MTF curve
    Fig. 3. MTF curve
    Wavefront tolerance analysis curve
    Fig. 4. Wavefront tolerance analysis curve
    ParameterNanoscribeOlympusZEISSOur project
    NA1.40.81.31.31.3
    Mag.63×25×100×100×100×
    W.D.0.360.380.20.20.5
    F.D.0.280.70.2650.231.00
    C.G.0.170.17
    nd1.5151.5151.5151.5151.522
    vd40.841.5834.1
    Table 1. Objective specification comparison
    ParameterSpec
    Spectral range /nm532-780
    Objective field number1.0
    Numerical aperture≥1.3
    Working distance≥0.5
    Total length<250
    RMS of wavefront error /λ0.09
    Distortion /%<0.5
    Table 2. Objective design specs
    MagnificationNANumber of lensNA·yNA2·y
    10×0.2240.1760.039
    20×0.4950.1960.096
    47.5×0.9170.1530.139
    98×1.2870.1040.134
    Table 3. Comparison of various microscope objectives
    ParameterSpec
    Spectral range /nm532-780
    Effective focal length7.5
    Half field of view /(°)4.2
    Objective field number1.0
    Numerical aperture1.316
    Working distance0.5
    Total length231.1
    RMS of wavefront error /λ0.05
    Distortion /%0.21
    Number lens element27
    Table 4. Specs of designed objective
    ItemValue
    Airspce0.005-0.01
    Tilt /rad0.00007-0.00029
    Decenter0.003-0.01
    Table 5. Alignment tolerances
    ItemValue
    Defocus of image surface0.001
    Lens 13(X direction)0.0105
    Lens 13(Y direction)0.0175
    Lens 25(X direction)0.0434
    Lens 25(Y direction)0.0505
    Table 6. Compensator range
    Muwang Huang, Xu Liu, Faguan Lin. Design of Large Field of View and High Numerical Aperture Microscope Objective[J]. Laser & Optoelectronics Progress, 2023, 60(5): 0518001
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