Effect of Tilt Angle of Surface to be Measured on Differential Confocal Microscope Pointing Signal

[in Chinese]; [in Chinese]

[1] S. Kimura, T. Wilson. Effect of axial pinhole displacement in confocal microscopes[J]. Appl. Opt., 1994, 33(14): 2257～2261

[2] Zhao Weiqian, Tan Jiubin, Qiu Lirong. A bipolar absolute heterodyne confocal approach to higher spatial resolution[J]. Opt. Express, 2004, 12(21): 5013～5021

[3] C. J. R. Sheppard,M. Gu, M. Roy. Signaltonoise ratio in confocal microscope systems[J]. J. Microscopy, 1992, 168(3): 209～218

[4] Wang Fusheng, Tan Jiubin, Zhao Weiqian. The optical probe using confocal technique for surface measurement[C]. Proc. SPIE, 2000, 4222: 194～197

[5] M. Gu. Principles of ThreeDimensional Imaging in Confocal Microscopes[M]. Singapore: World Scientific Publishing Co. Pte.Ltd., 1996. 1～174

[6] Zhao Weiqian, Tan Jiubin, Qiu Lirong et al.. A new laser heterodyne confocal probe for ultraprecision measurement of discontinuous contours[J]. Measurement Science and Technology, 2005, 16: 497～504

[7] C. J. R. Sheppard, H. J. Hatthews. The extendedfocus,autofocus and surfaceprofiling techniques of confocal microscopy[J]. J. Modern Optics, 1988, 35(1): 145～154 (in Chinese)

CLP Journals