• Journal of Infrared and Millimeter Waves
  • Vol. 39, Issue 1, 1 (2020)
Bao-Jian LIU, Wei-Bo DUAN*, Da-Qi LI, De-Ming YU, Gang CHEN, and Ding-Quan LIU
Author Affiliations
  • Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai200083, China
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    DOI: 10.11972/j.issn.1001-9014.2020.01.001 Cite this Article
    Bao-Jian LIU, Wei-Bo DUAN, Da-Qi LI, De-Ming YU, Gang CHEN, Ding-Quan LIU. The influence of annealing temperature on the structure and optical properties of silicon films deposited by electron beam evaporation[J]. Journal of Infrared and Millimeter Waves, 2020, 39(1): 1 Copy Citation Text show less
    References

    [1] S Bruynooghe. 48. Applied optics, 47, C47(2008).

    [2] H Yoda, K Shiraishi, Y Hiratani. a-Si:H/SiO2 multilayer films fabricated by radio-frequency magnetron sputtering for optical filters. Applied optics, 43, 3548-3554(2004).

    [3] L Mao, H Ye. New development of one-dimensional Si/SiO2 photonic crystals filter for thermophotovoltaic applications. Renewable Energy, 35, 249-256(2010).

    [4] I S Gainutdinov, E A Nesmelov, R D Aliakberov. Stabilization of the optical parameters of filters based on amorphous silicon. Journal of Optical Technology, 71, 842-846(2004).

    [5] C S Long, H H Lu, D F Lii. Effects of annealing on near-infrared shielding properties of Cs-doped tungsten oxide thin films deposited by electron beam evaporation. Surface & Coatings Technology,, 284, 75-79(2015).

    [6] S H Woo, C K Hwangbo. Effects of annealing on the optical, structural, and chemical properties of TiO2 and MgF2 thin films prepared by plasma ion-assisted deposition. Applied optics, 45, 1447-1455(2006).

    [7] A F Khan, M Mehmood, A M Rana. Effect of annealing on structural, optical and electrical properties of nanostructured Ge thin films. Applied Surface Science, 256, 2031-2037(2010).

    [8] M Zarchi, S Ahangarani. Study of silicon films deposited by EB-PVD and the effect of applying annealing conditions on them. Optik,, 154, 601-609(2018).

    [9] N Elghoul, S Kraiem, R Jemai. Annealing effects on electrical and optical properties of a-Si:H layer deposited by PECVD. Materials Science in Semiconductor Processing, 40, 302-309(2015).

    [10] X N Wang, X Y He, W F Mao. Microstructure evolution of amorphous silicon thin films upon annealing studied by positron annihilation. Materials Science in Semiconductor Processing,, 56, 344-348(2016).

    [11] G B Tong, M R Muhamad, S A Rahman. Optical properties of annealed Si:H thin film prepared by layer-by-layer(LBL) deposition technique. Physica B, 405, 4838-4844(2010).

    [12] M Netrvalová, V Vavruňková, J Müllerová. Optical properties of re-crystallized polycrystalline silicon thin films from a-Si films deposited by electron beam evaporation. Journal of Electrical Engineering, 60, 279-282(2009).

    [13] H Fujiwara. Spectroscopic Ellipsometry: Principles and Applications(2007).

    [14] M S Amin, N Hozhabri, R Magnusson. Effects of solid phase crystallization by rapid thermal annealing on the optical constants of sputtered amorphous silicon films. Thin Solid Films, 545, 480-484(2013).

    [15] J He, C Wang, W Li. Effect of gas temperature on the structural and optoelectronic properties of a-Si:H thin films deposited by PECVD. Surface & Coatings Technology, 214, 131-137(2013).

    [16] M Marinov, N Zotov. Model investigation of the Raman spectra of amorphous silicon. Physical Review B, 55, 2938-2944(1997).

    [17] W S Wei, G Y Xu, J L Wang. Raman spectra of intrinsic and doped hydrogenated nanocrystalline silicon films. Vacuum, 81, 656-662(2007).

    [18] N Zotov, M Marinov, N Mousseau. Dependence of the vibrational spectra of amorphous silicon on the defect concentration and ring distribution. Journal of Physics Condensed Matter,, 11, 9647-9658(1999).

    [19] R A Street. Hydrogenated Amorphous Silicon(1991).

    [20] O Astakhov, R Carius, A Lambertz. Structure of the ESR spectra of thin film silicon after electron bombardment. Journal of Non-Crystalline Solids, 19, 2329-2332(354).

    Bao-Jian LIU, Wei-Bo DUAN, Da-Qi LI, De-Ming YU, Gang CHEN, Ding-Quan LIU. The influence of annealing temperature on the structure and optical properties of silicon films deposited by electron beam evaporation[J]. Journal of Infrared and Millimeter Waves, 2020, 39(1): 1
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