Fig. 1. Continuous wave (CW) laser fabrication of 3D inorganic micro and nanostructures. (a) 473 nm CW laser writes patterning information in glass ^[3]; (b) photograph of 105 layers glass structure processed by CO₂ laser (left), optical microscope image of sidewall section (right) ^[39]; (c) glass microlens array processed by CO₂ laser, the image on the right is the image effect of a single microlen^[40]; (d) 3D transparent glass microstructures processed by 442 nm CW laser^[41]; (e) unsupported ceramic microstructures fabricated by 980 nm CW laser ^[42]

Fig. 2. Picosecond laser fabricating 3D inorganic micro and nanostructures. (a) Picosecond laser welding ceramic components^[44]; (b) end face of damaged channel^[46]; (c) picosecond laser embedded 3D structure in transparent glass^[47]; (d) 3D microstructure of glass fabricated by picosecond laser fabricating HSQ^[51]

Fig. 3. Femtosecond laser fabrication of 3D inorganic micro and nanostructures in glass. (a) Permanent trace in glass^[54]; (b) femtosecond laser writes low loss curved waveguide in glass^[56]; (c) patterning of femtosecond laser inside Au doped glass^[62]; (d) femtosecond laser writing of depth information in glass^[64]; (e) CsPbBr₃ nanocrystalline structures prepared by femtosecond laser^[65]; (f) femtosecond laser writing 3D inorganic microstructure based on HSQ^[69]

Fig. 4. Femtosecond laser fabricating 3D inorganic micro and nanostructures in optical crystal. (a) End view of concave cladding waveguide written in YAG∶Nd^{3+ [70]}; (b) waveguide end face written in LiNbO₃ crystal^[74]; (c) cross section of waveguide in ZnS crystal^[71]; (d) double line (No.1) and concave cladding (No.2) waveguides generated in LBO crystal^[73]; (e) nanoscale regulation of femtosecond laser in LiNbO₃ crystal^[78]; (f) femtosecond laser writes holograms of specific patterns in LiNbO₃ crystal^[80]

Fig. 5. Femtosecond laser fabrication of 3D inorganic micro and nanostructures based on ceramics and quantum dots. (a) Femtosecond laser-induced chemical bonding of quantum dots to form 3D inorganic micro and nanostructures^[32]; (b) femtosecond laser printing of mixed quantum dots to form a 3D nanopillar array^[81]; (c) femtosecond laser fabricating circular waveguides in ceramics with spiral motion^[84]

Fig. 6. Femtosecond laser fabricating of 3D inorganic micro and nanostructures in precursor photoresist containing inorganic components. (a) Self supporting aspheric microlens ^[85]; (b) tetrahedral cell ^[86]; (c) free form sculpture ^[87]; (d) micron cross torsion structure ^[88]; (e) drying shrinkage process causes 3D structural cracks ^[89]; (f) porous microchannel structure ^[90]; (g) microlens printed on support column ^[91]; (h) 150 μm-high diffractive micro objective lens^[33]

Fig. 7. Femtosecond laser fabrication of 3D inorganic micro and nanostructures based on inorganic nanoparticles doped photoresists. (a) Transparent glass microstructure^[92]; (b) pendant ^[93]; (c) disk truss structure (left) and octahedral truss structure (right)^[94]; (d) ceramic lattice cube ^[95]

Fig. 8. 3D inorganic micro and nanostructures prepared by the polymer template assisted femtosecond laser fabrication method. (a) Alumina octahedral truss nanolattice^[97]; (b) microstructure of DNA double helix hollow glass^[10]; (c) 3D silicon nanostructure^[98]; (d) double-well ceramic nanolattice^[99]; (e) 3D hollow spiral microtubule structure^[100]

Fig. 9. Application of 3D inorganic microstructure as optical micro devices. (a) Microring optical resonator^[94]; (b) glass microlens^[92]; (c) Alvarez lens^[2]; (d) Fresnel lens^[69]; (e) photonic micro ring resonator^[51]; (f) plano convex microlens with aspheric profile^[33]

Fig. 10. Laser fabrication of 3D inorganic micro and nanostructures for quantum chips. (a) Femtosecond laser patterns resistors^[102]; (b) femtosecond laser directly writing optical waveguide (left) and waveguide directional coupler (right)^{inside the glass[104]; (c) femtosecond laser direct writing 3D waveguide array (top left), photonic lattice section (bottom left), schematic diagram of coupling one waveguide to other waveguides in a 3D waveguide array (upper right), and evolution pattern of single photon output after quantum walk in the lattice (lower right)[106]; (d) 3D layout of three qubit Toffoli gate encoded by femtosecond laser direct writing path[107]}

Fig. 11. Application of laser fabricated 3D inorganic micro and nanostructures. (a) Femtosecond laser erasure/recovery^[66]; (b) QR code encryption demonstration^[67]; (c) patterning of Cl^-Br^-—I^- codoped glass^[65]; (d) side view of laser welding^[112]; (e) assembly drawing of successful laser welding^[44]; (f) vertical waveguide in the sensor^[7]; (g) microstructure of storage bin^[115]; (h) fabrication of fused quartz by circularly polarized laser pulses^[117]; (i) effect comparison between bare quartz glass and quartz glass with anti-reflective structure^[118]; (j) truncated cone array ^[119]