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    Journals >Acta Optica Sinica >Volume 8 >Issue 5 >Page 454 > Article
    • Acta Optica Sinica
    • Vol. 8, Issue 5, 454 (1988)
    Low-energy ion-assisted deposition of Ta2O5 films
    ZHOU JIuliN, ZHANG WAN, and YAnG DELI
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    ZHOU JIuliN, ZHANG WAN, YAnG DELI. Low-energy ion-assisted deposition of Ta2O5 films[J]. Acta Optica Sinica, 1988, 8(5): 454 Copy Citation Text show less
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    ZHOU JIuliN, ZHANG WAN, YAnG DELI. Low-energy ion-assisted deposition of Ta2O5 films[J]. Acta Optica Sinica, 1988, 8(5): 454
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